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Published in:
1984 | OriginalPaper | Chapter
Organic SIMS Studies with a Hollow Anode Ion Source
Authors : Y. Naito, K. Tanaka, T. Sueyoshi
Published in: Secondary Ion Mass Spectrometry SIMS IV
Publisher: Springer Berlin Heidelberg
Included in: Professional Book Archive
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Fast atom bombardment (FAB), a new ionization technique, has been applied to many areas in organic SIMS. Neutral ion sources such as the saddle field neutral source [1] and fast atom capillaritron [2] have been used as primary neutral beam sources for this technique. Since a hollow anode ion source yields good results for ion beam thinning application, we expect that it will have good characteristics as a neutral beam source.