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Optical and Quantum Electronics

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01-11-2016

Picosecond laser fabrication of microchannels inside Foturan glass at CO₂ laser irradiation and following etching

Authors: M. M. Sergeev, V. P. Veiko, E. Y. Tiguntseva, R. O. Olekhnovich

Published in: Optical and Quantum Electronics | Issue 11/2016

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Abstract

In this work, the formation of hollow-type microchannels in the bulk of a photostructurable glass of the brand Foturan is proposed. It is based on the chemical dissolution of crystallized areas, which are formed as a result of the action of picosecond laser pulses and photothermal treatment produced by CO₂ laser irradiation. A speed of formation of microchannels was estimated. Microchannels formation features at each stage of laser irradiation are discussed, and the dependence of microchannels characteristics (size, shape and roughness of inner walls) on laser processing and chemical etching parameters were evaluated as well.

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Title: Picosecond laser fabrication of microchannels inside Foturan glass at CO2 laser irradiation and following etching
Authors: M. M. Sergeev
V. P. Veiko
E. Y. Tiguntseva
R. O. Olekhnovich
Publication date: 01-11-2016
Publisher: Springer US
Published in: Optical and Quantum Electronics / Issue 11/2016
Print ISSN: 0306-8919
Electronic ISSN: 1572-817X
DOI: https://doi.org/10.1007/s11082-016-0752-2

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