2017 | OriginalPaper | Chapter
Preparation of Porous Titanium Oxide Film by Sol-Gel Method
Authors : Guobo Yang, Baoqiang Xu, Xianjun Lei, Hongpin Dai, Xutao Guo, Jian Wu, Bin Yang
Published in: TMS 2017 146th Annual Meeting & Exhibition Supplemental Proceedings
Publisher: Springer International Publishing
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Abstract
In this paper, porous titanium oxide films were prepared through sol-gel route by using titanium butoxide (Ti(OC4H9)4) as a precursor and PEG-2000(polyethylene glycol) on monocrystalline silicon/stainless steel substrate. Some impact factors for pore characterization were investigated by means of Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM). The results indicate porous films with 20–250 nm spherical pores were prepared. The pore diameter gradually becomes bigger with the dosage of PEG increasing but almost unchangeable through changing the drying temperature. With increases of pulling times and sintering temperature, the pore diameter reduced and enlarged slightly, respectively. The different material substrates remarkably affect the surface of porous titanium oxide films.