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Microsystem Technologies
Published in: Microsystem Technologies 11-12/2007

01-07-2007 | Technical Paper

Quality factor of micro cantilevers transduced by piezoelectric lead zirconate titanate film

Authors: Jian Lu, Tsuyoshi Ikehara, Takeshi Kobayashi, Ryutaro Maeda, Takashi Mihara

Published in: Microsystem Technologies | Issue 11-12/2007

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Abstract

The quality factors (Q-factor) of micro cantilevers transduced by piezoelectric lead zirconate titanate (PZT) film under atmospheric pressure conditions were investigated and discussed. It was found that Q-factors increased with thicker PZT film. Due to air damping, shorter cantilevers resulted in preferred larger Q-factors. The Q-factor was found to be as high as 450 for a 150-μm long PZT cantilever when using 1.04-μm thick PZT film as the electromechanical conversion medium. Differences in the measured Q-factors when using integrated PZT film self-excitation and external PZT vibrator actuation indicate that energy dissipation induced by the electromechanical coupling in PZT thin films was noteworthy even under atmospheric pressure conditions. Moreover, the mechanical properties of the PZT film were found contribute significantly to decreases of the Q-factor.
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Metadata
Title
Quality factor of micro cantilevers transduced by piezoelectric lead zirconate titanate film
Authors
Jian Lu
Tsuyoshi Ikehara
Takeshi Kobayashi
Ryutaro Maeda
Takashi Mihara
Publication date
01-07-2007
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 11-12/2007
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-006-0272-2

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