Skip to main content
Disciplines
Automotive Business IT + Informatics Construction + Real Estate Electrical Engineering + Electronics Energy + Sustainability Insurance + Risk Finance + Banking Management + Leadership Marketing + Sales Mechanical Engineering + Materials
Events
DE
EN
Books
Journals
Topic Page
Marketing
Start single access now
Access for companies
EXTENDED SEARCH
Log in
Top
Published in:
BER Performance Evaluation of Different Modulation Techniques for Underwater FSO Communication System Read chapter Read first chapter

2020 | OriginalPaper | Chapter

Refractive Index and Dielectric Constant Evaluation of RF Sputtered Few Layer MoS2 Thin Film

Authors : Richa Singh, Shweta Tripathi

Published in: Advances in VLSI, Communication, and Signal Processing

Publisher: Springer Singapore

Log in

Activate our intelligent search to find suitable subject content or patents.

search-config
loading …

Abstract

In this paper thin film of MoS2 has been deposited on pSi substrate at different time by RF sputtering method, X-ray diffraction pattern shows crystalline growth. Different optical parameters like refractive index, extinction coefficient and dielectric constant have been analyzed. It has been observed that the estimated optical parameters show the thickness depended behavior. Surface analysis has been done using FESEM that agrees with obtained optical parameters. All the optical parameters have been calculated using VASE Ellipsometer.

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

inform now

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

inform now
previous chapter Work Function Estimation of Copper-Doped ZnO Thin Film
next chapter Design and Optimization of MEMS Piezoelectric Cantilever for Vibration Energy Harvesting Application
Literature
1.
Benavente, E., Santa Ana, M.A., Mendizabal, F., Gonzalez, G.: Intercalation chemistry of molybdenum disulfide. Coord. Chem. Rev. 224, 87–109 (2002)CrossRef
2.
Lee, C., Yan, H., Brus, L.E., Heinz, T.F., Hone, J., Ryu, S.: Anomalous lattice vibrations of single-and few-layer MoS2. ACS Nano 4(5), 2695–2700 (2010)CrossRef
3.
Song, I., Park, C., Choi, H.C.: Synthesis and properties of molybdenum disulphide: from bulk to atomic layers. RSC Adv. 5(10), 7495–7514 (2015)CrossRef
4.
Li, Y., Wang, H., Xie, L., Liang, Y., Hong, G., Dai, H.: MoS2 nanoparticles grown on graphene: an advanced catalyst for the hydrogen evolution reaction. J. Am. Chem. Soc. 133(19), 7296–7299 (2011)CrossRef
5.
Li, X., Zhu, H.: Two-dimensional MoS2: properties, preparation, and applications. J. Materiomics 1(1), 33–44 (2015)CrossRef
6.
Kim, H.S., Kumar, M.D., Kim, J., Lim, D.: Vertical growth of MoS2 layers by sputtering method for efficient photoelectric application. Sens. Actuators A 269, 355–362 (2018)CrossRef
7.
Bruzzese, D.G.: Use of spectroscopic ellipsometry and modeling in determining composition and thickness of barium strontium titanate thin films (2010)
8.
Yim, C., O’Brien, M., McEvoy, N., Winters, S., Mirza, I., Lunney, J.G., Duesberg, G.S.: Investigation of the optical properties of MoS2 thin films using spectroscopic ellipsometry. Appl. Phys. Lett. 104(10), 103114 (2014)CrossRef
9.
Funke, S., Miller, B., Parzinger, E., Thiesen, P., Holleitner, A.W., Wurstbauer, U.: Imaging spectroscopic ellipsometry of MoS2. J. Phys. Condens. Matter 28(38), 385301 (2016)CrossRef
10.
Di Giulio, M., Micocci, G., Rella, R., Siciliano, P., Tepore, A.: Optical absorption of tellurium suboxide thin films. Phys. Status Solidi (a) 136, K101 (1993)CrossRef
11.
Xu, J., He, T., Chai, L., Qiao, L., Wang, P., Liu, W.: Growth and characteristics of self-assembled MoS 2/Mo-SC nanoperiod multilayers for enhanced tribological performance. Sci. Rep. 6, 25378 (2016)CrossRef
12.
Kang, H.S., Ahn, B.D., Kim, J.H., Kim, G.H., Lim, S.H., Chang, H.W., Lee, S.Y.: Structural, electrical, and optical properties of p-type ZnO thin films with Ag dopant. Appl. Phys. Lett. 88(20), 202108 (2006)CrossRef
13.
Kaindl, R., Bayer, B. C., Resel, R., Müller, T., Skakalova, V., Habler, G., Abart, R., Cherevan, A.S., Eder, D., Blatter, M., Fischer, F.: Growth, structure and stability of sputter-deposited MoS2 thin films. Beilstein J. Nanotechnol. 8, 1115 (2017)CrossRef
Metadata
Title
Refractive Index and Dielectric Constant Evaluation of RF Sputtered Few Layer MoS2 Thin Film
Authors
Richa Singh
Shweta Tripathi
Copyright Year
2020
Publisher
Springer Singapore
Book
Advances in VLSI, Communication, and Signal Processing

Print ISBN: 978-981-329-774-6

Electronic ISBN: 978-981-329-775-3

Copyright Year: 2020

DOI
https://doi.org/10.1007/978-981-32-9775-3_59