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2018 | OriginalPaper | Chapter

5. Scanning Electron Microscope (SEM) Instrumentation

Authors : Joseph I. Goldstein, Dale E. Newbury, Joseph R. Michael, Nicholas W. M. Ritchie, John Henry J. Scott, David C. Joy

Published in: Scanning Electron Microscopy and X-Ray Microanalysis

Publisher: Springer New York

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Why worry about electron optical parameters?

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Glass lenses and transmission electron microscope lenses also have a related property known as depth-of-focus, a term that is often confused with depth-of-field. Depth-of-field refers to the range of heights in simultaneous focus on the sample (i.e., the observed field). In contrast, depth-of-focus refers to the range of positions near the imaging plane of the lens where the image is in focus. This determines, for example, how far away from the ideal imaging plane of the lens you can place a piece of film, or a CCD detector, and still capture an in-focus image. Because SEMs capture images via scanning action, the term depth-of-focus is not relevant.

Everhart T, Thornley R (1960) Wide-band detector for micro-microampere low-energy electron currents. J Sci Instrum 37:246CrossRef

Fiori C, Yakowitz H, Newbury D (1974) Some techniques of signal processing in scanning electron microscopy. In: Johari O (ed) SEM/1974. IIT Research Institute, Chicago, p 167

Jones R (1959) Phenomenological description of the response and detecting ability of radiation detectors. Adv Electr Electron Opt 11:88

Joy DC, Joy CS, Bunn RD (1996) Measuring the performance of scanning electron microscope detectors. Scanning 18:533CrossRef

Newbury DE (1976) “The utility of specimen current imaging in the scanning electron microscope” SEM/1976/I. IIT Research Inst, Chicago, p 111

Robinson V (1975) “Backscattered electron imaging” SEM/1975, I. IIT Research Inst, Chicago, p 51

Wells OC (1957) The construction of a scanning electron microscope and its application to the study of fibres. Ph. D. Diss., Cambridge University, Cambridge

Title: Scanning Electron Microscope (SEM) Instrumentation
Authors: Joseph I. Goldstein
Dale E. Newbury
Joseph R. Michael
Nicholas W. M. Ritchie
John Henry J. Scott
David C. Joy
Publisher: Springer New York
Book: Scanning Electron Microscopy and X-Ray Microanalysis
Print ISBN: 978-1-4939-6674-5

Electronic ISBN: 978-1-4939-6676-9

Copyright Year: 2018
DOI: https://doi.org/10.1007/978-1-4939-6676-9_5

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