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Journal of Materials Science

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01-10-2010

Stability of the nitrogen-deficient Ti₂AlN_x MAX phase in Ar²⁺-irradiated (Ti,Al)N/Ti₂AlN_x multilayers

Authors: M. Bugnet, T. Cabioc’h, V. Mauchamp, Ph. Guérin, M. Marteau, M. Jaouen

Published in: Journal of Materials Science | Issue 20/2010

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Abstract

The effects of 100 keV Ar²⁺ ion irradiation on the structure and stability of multilayered dc sputtered and annealed thin films of (Ti,Al)N/Ti₂AlN_x have been investigated with X-ray diffraction and transmission electron microscopy. It is shown that the multilayer structure is preserved as well as the crystalline structures of both components. This demonstrates a high tolerance of the Ti₂AlN_x MAX phase in multilayers to damage induced by nuclear elastic interactions. It is suggested that damage recovery may originate from native nitrogen vacancies and from the interfaces that act as sinks for point defects, like Frenkel pairs, created during the irradiation.

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Title: Stability of the nitrogen-deficient Ti2AlN x MAX phase in Ar2+-irradiated (Ti,Al)N/Ti2AlN x multilayers
Authors: M. Bugnet
T. Cabioc’h
V. Mauchamp
Ph. Guérin
M. Marteau
M. Jaouen
Publication date: 01-10-2010
Publisher: Springer US
Published in: Journal of Materials Science / Issue 20/2010
Print ISSN: 0022-2461
Electronic ISSN: 1573-4803
DOI: https://doi.org/10.1007/s10853-010-4615-0

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