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Measurement Techniques
Published in: Measurement Techniques 10/2013

01-01-2013 | Nanometrology

Standard sample for calibration of transmission electron microscopes nanometrology

Authors: D. S. Bodunov, V. P. Gavrilenko, A. V. Zablotskii, A. A. Kuzin, A. Yu. Kuzin, V. B. Mityukhlyaev, A. V. Rakov, P. A. Todua, M. N. Filippov

Published in: Measurement Techniques | Issue 10/2013

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Abstract

A prototype standard sample GSO 10030-2011 for the stepped parameters of thin layers of single crystal silicon is developed and certified. It is intended for calibration of transmission electron microscopes at magnifications of 1000–1,500,000×. The certified parameters are the step size of the stepped structure and the distance between the (111) planes of the single crystal silicon in this material. Both parameters are independently traceable to the unit of length, the meter.
previous article Forming an optimum experimental design for statistical estimation of the probability of a random event using random sequential sampling
next article A method of eliminating the influence of magnetic field in a dynamic laser goniometer linear and angular measurements

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Literature
1.
L. M. Utevskii, Diffraction Electron Microscopy in Metallurgy [in Russian], Metallurgiya, Moscow (1973).
2.
D. Williams and C. Carter, Transmission Electron Microscopy: A Textbook for Materials Science, Springer Science + Business Media, NY (2009).
3.
Yu. A. Novikov et al., “Linear gauge in the micrometer and nanometer ranges for scanning electron and atomic-force microscopy,” in: Trudy IOFAN (2006), Vol. 62, pp. 36–76.
4.
NIST 2008 SRM 2000, Calibration Standard for High-Resolution x-Ray Diffraction, pp. 1–11.
5.
GOST R 8.631-2007, GSI. Electron Measurement Microscopes. Verification Technique.
6.
GOST R 8.629-2007, GSI. Relief Gauges in the Nanometer Range with Trapezoidal Element Profiles. Verification Technique.
Metadata
Title
Standard sample for calibration of transmission electron microscopes nanometrology
Authors
D. S. Bodunov
V. P. Gavrilenko
A. V. Zablotskii
A. A. Kuzin
A. Yu. Kuzin
V. B. Mityukhlyaev
A. V. Rakov
P. A. Todua
M. N. Filippov
Publication date
01-01-2013
Publisher
Springer US
Published in
Measurement Techniques / Issue 10/2013
Print ISSN: 0543-1972
Electronic ISSN: 1573-8906
DOI
https://doi.org/10.1007/s11018-012-0098-5

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