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Microsystem Technologies

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01-10-2014 | Technical Paper

Status of laminar grating manufacturing via lithography at HZB

Authors: S. Lemke, T. Seliger, I. Rudolph, O. Kutz, Ph. Goettert, B. Nelles, F. Senf, B. Loechel

Published in: Microsystem Technologies | Issue 10-11/2014

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Abstract

In 2009 Carl Zeiss stopped the manufacture of precision gratings. All users of precision gratings were very concerned about this decision, since they all need such gratings for their experiments. One of the institutes of the HZB, the Institute for Nanometer Optics and Technology (INT), has extensive experience in micro fabrication (technology group). In spring 2010, HZB decided to take over the old C. Zeiss grating fabrication and build up its own technology center for grating fabrication. Using governmental support, HZB has installed all necessary equipment and processes to fabricate high quality gratings for the synchrotron radiation community.

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Eggenstein F, Schäfers F, Erko A, Follath R, Gaupp A, Löchel B, Senf F, Zeschke T (2013) A reflectometer for at-wavelength characterization of gratings. Nucl Instrum Methods Phys Res A 710:166–171CrossRef

Loechel B, Erko A, Lemke S, Nelles B, Schmidt M, Senf F (2013) Installation of a technological center for highly efficient optical gratings at Helmholtz-Zentrum Berlin (HZB). J Phys Conf Ser 425:212012CrossRef

Siewert F (2013) Metrology, mirrors and gratings, advances and challenges in synchrotron optics. J Phys Conf Ser 425:152001CrossRef

Title: Status of laminar grating manufacturing via lithography at HZB
Authors: S. Lemke
T. Seliger
I. Rudolph
O. Kutz
Ph. Goettert
B. Nelles
F. Senf
B. Loechel
Publication date: 01-10-2014
Publisher: Springer Berlin Heidelberg
Published in: Microsystem Technologies / Issue 10-11/2014
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-013-2061-z

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