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Published in: Glass and Ceramics 11-12/2017

29-03-2017 | COATINGS

Surface Relief Forming on Optical Ceramic Articles by Laser Pyrolysis of Organosilicon Materials

Authors: E. V. Dorofeeva, P. Yu. Lobanov, I. S. Manuilovich, M. N. Meshkov, O. E. Sidoryuk

Published in: Glass and Ceramics | Issue 11-12/2017

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Abstract

This is devoted to the development of technology for forming the required microrelief of the optical surfaces of glass-ceramic substrates. It is shown that the problem can be solved by using controlled local deposition of silicon dioxide coatings on the surface by laser pyrolysis of tetraethoxysilane vapor in the presence of ozone. The characteristics of the experimental samples are presented and are compared with data obtained from mathematical modeling of the results of technological processes. It is shown that the developed technology can be used to profile substrates with large radii of curvature by successive deposition of multifilm coatings of interference spherical mirrors.

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Metadata
Title
Surface Relief Forming on Optical Ceramic Articles by Laser Pyrolysis of Organosilicon Materials
Authors
E. V. Dorofeeva
P. Yu. Lobanov
I. S. Manuilovich
M. N. Meshkov
O. E. Sidoryuk
Publication date
29-03-2017
Publisher
Springer US
Published in
Glass and Ceramics / Issue 11-12/2017
Print ISSN: 0361-7610
Electronic ISSN: 1573-8515
DOI
https://doi.org/10.1007/s10717-017-9898-z

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