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Published in:
1996 | OriginalPaper | Chapter
The Evolving Role of Rapid Thermal Processing for Deep Submicron Devices
Author : Bohumil Lojek
Published in: Advances in Rapid Thermal and Integrated Processing
Publisher: Springer Netherlands
Included in: Professional Book Archive
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Since the introduction of the first commercially available Rapid Thermal Processing (RTP) systems some twenty years ago, it has been claimed that RTP technology is required for manufacturing processes. However, until recently RTP technology has been almost ignored by manufacturing due to low reproducibility in processing. The main reason for this situation is the fact that an alternative processing technology was widely available: the conventional batch processing furnace.