Skip to main content
Top
Published in: Journal of Materials Science: Materials in Electronics 2/2017

02-09-2016

The substrate effect on Ge doped GaN thin films coated by thermionic vacuum arc

Authors: Soner Özen, Şadan Korkmaz, Volkan Şenay, Suat Pat

Published in: Journal of Materials Science: Materials in Electronics | Issue 2/2017

Log in

Activate our intelligent search to find suitable subject content or patents.

search-config
loading …

Abstract

This study focuses on characterization and understanding of the substrate effect on Ge doped GaN thin films coated onto transparent substrates. The produced films were deposited onto unheated glass and unheated polyethylene terephthalate by using thermionic vacuum arc technique. Gallium nitride and germanium pellets were used in the thin film production. Reflectance, refractive index and thicknesses of Ge doped GaN thin films were measured by optical interferometer using Cauchy model for fitting. The transmittances were determined in the wavelength range between 200 and 1000 nm by using UV–Vis double beam spectrophotometer. The optical Tauc method was used to determine the band gap energies of produced thin films. Surface morphologies of produced thin films were characterized by atomic force microscopy and also field emission scanning electron microscopy. In conclusion, the substrate effect on the optical and morphological properties of the produced thin films was observed.

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Springer Professional "Wirtschaft"

Online-Abonnement

Mit Springer Professional "Wirtschaft" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 340 Zeitschriften

aus folgenden Fachgebieten:

  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Versicherung + Risiko




Jetzt Wissensvorsprung sichern!

Literature
1.
go back to reference Y. Oshima, T. Yoshida, K. Watanabe, T. Mishima, Properties of Ge-doped, high-quality bulk GaN crystals fabricated by hydride vapor phase epitaxy. J. Cryst. Growth 312, 3569–3573 (2010)CrossRef Y. Oshima, T. Yoshida, K. Watanabe, T. Mishima, Properties of Ge-doped, high-quality bulk GaN crystals fabricated by hydride vapor phase epitaxy. J. Cryst. Growth 312, 3569–3573 (2010)CrossRef
2.
go back to reference T. Honda, M. Shibata, M. Kurimoto, M. Tsubamoto, J. Yamamoto, H. Kawanishi, Band-gap energy and effective mass of BGaN. Jpn. J. Appl. Phys. 39, 2389 (2000)CrossRef T. Honda, M. Shibata, M. Kurimoto, M. Tsubamoto, J. Yamamoto, H. Kawanishi, Band-gap energy and effective mass of BGaN. Jpn. J. Appl. Phys. 39, 2389 (2000)CrossRef
3.
go back to reference L. Teles, L. Scolfaro, J. Leite, J. Furthmüller, F. Bechstedt, Spinodal decomposition in BxGa1−xN and BxAl1−xN alloys. Appl. Phys. Lett. 80, 1177–1179 (2002)CrossRef L. Teles, L. Scolfaro, J. Leite, J. Furthmüller, F. Bechstedt, Spinodal decomposition in BxGa1−xN and BxAl1−xN alloys. Appl. Phys. Lett. 80, 1177–1179 (2002)CrossRef
4.
go back to reference S. Pat, Ş. Korkmaz, S. Özen, V. Şenay, GaN thin film deposition on glass and PET substrates by thermionic vacuum arc (TVA). Mater. Chem. Phys. 159, 1–5 (2015)CrossRef S. Pat, Ş. Korkmaz, S. Özen, V. Şenay, GaN thin film deposition on glass and PET substrates by thermionic vacuum arc (TVA). Mater. Chem. Phys. 159, 1–5 (2015)CrossRef
5.
go back to reference D.-W. Kang, J.-Y. Kwon, J. Shim, H.-M. Lee, M.-K. Han, Highly conductive GaN anti-reflection layer at transparent conducting oxide/Si interface for silicon thin film solar cells. Sol. Energy Mater. Sol. C 105, 317–321 (2012)CrossRef D.-W. Kang, J.-Y. Kwon, J. Shim, H.-M. Lee, M.-K. Han, Highly conductive GaN anti-reflection layer at transparent conducting oxide/Si interface for silicon thin film solar cells. Sol. Energy Mater. Sol. C 105, 317–321 (2012)CrossRef
6.
go back to reference S.L. Selvaraj, A. Watanabe, T. Egawa, Influence of deep-pits on the device characteristics of metal-organic chemical vapor deposition grown AlGaN/GaN high-electron mobility transistors on silicon substrate. Appl. Phys. Lett. 98, 252105 (2011)CrossRef S.L. Selvaraj, A. Watanabe, T. Egawa, Influence of deep-pits on the device characteristics of metal-organic chemical vapor deposition grown AlGaN/GaN high-electron mobility transistors on silicon substrate. Appl. Phys. Lett. 98, 252105 (2011)CrossRef
7.
go back to reference R. Kirste, M.P. Hoffmann, E. Sachet, M. Bobea, Z. Bryan, I. Bryan, C. Nenstiel, A. Hoffmann, J.-P. Maria, R. Collazo, Ge doped GaN with controllable high carrier concentration for plasmonic applications. Appl. Phys. Lett. 103, 242107 (2013)CrossRef R. Kirste, M.P. Hoffmann, E. Sachet, M. Bobea, Z. Bryan, I. Bryan, C. Nenstiel, A. Hoffmann, J.-P. Maria, R. Collazo, Ge doped GaN with controllable high carrier concentration for plasmonic applications. Appl. Phys. Lett. 103, 242107 (2013)CrossRef
8.
go back to reference F. Qian, Y. Li, S. Gradecak, D. Wang, C.J. Barrelet, C.M. Lieber, Gallium nitride-based nanowire radial heterostructures for nanophotonics. Nano Lett. 4, 1975–1979 (2004)CrossRef F. Qian, Y. Li, S. Gradecak, D. Wang, C.J. Barrelet, C.M. Lieber, Gallium nitride-based nanowire radial heterostructures for nanophotonics. Nano Lett. 4, 1975–1979 (2004)CrossRef
9.
go back to reference S. Nakamura, T. Mukai, M. Senoh, Si- and Ge-doped GaN films grown with GaN buffer layers. Jpn. J. Appl. Phys. 31, 2883 (1992)CrossRef S. Nakamura, T. Mukai, M. Senoh, Si- and Ge-doped GaN films grown with GaN buffer layers. Jpn. J. Appl. Phys. 31, 2883 (1992)CrossRef
10.
go back to reference A. Dadgar, J. Bläsing, A. Diez, A. Krost, Crack-free, highly conducting GaN layers on Si substrates by Ge doping. Appl. Phys. Express 4, 011001 (2011)CrossRef A. Dadgar, J. Bläsing, A. Diez, A. Krost, Crack-free, highly conducting GaN layers on Si substrates by Ge doping. Appl. Phys. Express 4, 011001 (2011)CrossRef
11.
go back to reference S. Fritze, A. Dadgar, H. Witte, M. Bügler, A. Rohrbeck, J. Bläsing, A. Hoffmann, A. Krost, High Si and Ge n-type doping of GaN doping-limits and impact on stress. Appl. Phys. Lett. 100, 122104 (2012)CrossRef S. Fritze, A. Dadgar, H. Witte, M. Bügler, A. Rohrbeck, J. Bläsing, A. Hoffmann, A. Krost, High Si and Ge n-type doping of GaN doping-limits and impact on stress. Appl. Phys. Lett. 100, 122104 (2012)CrossRef
12.
go back to reference A.B. Greytak, L.J. Lauhon, M.S. Gudiksen, C.M. Lieber, Growth and transport properties of complementary germanium nanowire field-effect transistors. Appl. Phys. Lett. 84, 4176–4178 (2004)CrossRef A.B. Greytak, L.J. Lauhon, M.S. Gudiksen, C.M. Lieber, Growth and transport properties of complementary germanium nanowire field-effect transistors. Appl. Phys. Lett. 84, 4176–4178 (2004)CrossRef
13.
go back to reference P. Hageman, W. Schaff, J. Janinski, Z. Liliental-Weber, n-type doping of wurtzite GaN with germanium grown with plasma-assisted molecular beam epitaxy. J. Cryst. Growth 267, 123–128 (2004)CrossRef P. Hageman, W. Schaff, J. Janinski, Z. Liliental-Weber, n-type doping of wurtzite GaN with germanium grown with plasma-assisted molecular beam epitaxy. J. Cryst. Growth 267, 123–128 (2004)CrossRef
14.
go back to reference S. Özen, V. Şenay, S. Pat, Ş. Korkmaz, Investigation on the morphology and surface free energy of the AlGaN thin film. J. Alloys Compd. 653, 162–167 (2015)CrossRef S. Özen, V. Şenay, S. Pat, Ş. Korkmaz, Investigation on the morphology and surface free energy of the AlGaN thin film. J. Alloys Compd. 653, 162–167 (2015)CrossRef
15.
go back to reference S. Özen, V. Şenay, S. Pat, Ş. Korkmaz, The influence of voltage applied between the electrodes on optical and morphological properties of the InGaN thin films grown by thermionic vacuum arc. Scanning 38, 14–20 (2015)CrossRef S. Özen, V. Şenay, S. Pat, Ş. Korkmaz, The influence of voltage applied between the electrodes on optical and morphological properties of the InGaN thin films grown by thermionic vacuum arc. Scanning 38, 14–20 (2015)CrossRef
16.
go back to reference S. Özen, V. Şenay, S. Pat, Ş. Korkmaz, Deposition of a Mo doped GaN thin film on glass substrate by thermionic vacuum arc (TVA). J. Mater. Sci.: Mater. Electron. 26, 5060–5064 (2015) S. Özen, V. Şenay, S. Pat, Ş. Korkmaz, Deposition of a Mo doped GaN thin film on glass substrate by thermionic vacuum arc (TVA). J. Mater. Sci.: Mater. Electron. 26, 5060–5064 (2015)
17.
go back to reference K. Motoki, M. Ueno, Oxygen doping method to gallium nitride single crystal substrate, in, Google Patents, 2014 K. Motoki, M. Ueno, Oxygen doping method to gallium nitride single crystal substrate, in, Google Patents, 2014
18.
go back to reference M. Feneberg, K. Lange, C. Lidig, M. Wieneke, H. Witte, J. Bläsing, A. Dadgar, A. Krost, R. Goldhahn, Anisotropy of effective electron masses in highly doped nonpolar GaN. Appl. Phys. Lett. 103, 232104 (2013)CrossRef M. Feneberg, K. Lange, C. Lidig, M. Wieneke, H. Witte, J. Bläsing, A. Dadgar, A. Krost, R. Goldhahn, Anisotropy of effective electron masses in highly doped nonpolar GaN. Appl. Phys. Lett. 103, 232104 (2013)CrossRef
19.
go back to reference E. Schubert, I. Goepfert, W. Grieshaber, J. Redwing, Optical properties of Si-doped GaN. Appl. Phys. Lett. 71, 921–923 (1997)CrossRef E. Schubert, I. Goepfert, W. Grieshaber, J. Redwing, Optical properties of Si-doped GaN. Appl. Phys. Lett. 71, 921–923 (1997)CrossRef
20.
go back to reference P. Tchoulfian, F. Donatini, F. Levy, B. Amstatt, P. Ferret, J. Pernot, High conductivity in Si-doped GaN wires. Appl. Phys. Lett. 102, 122116 (2013)CrossRef P. Tchoulfian, F. Donatini, F. Levy, B. Amstatt, P. Ferret, J. Pernot, High conductivity in Si-doped GaN wires. Appl. Phys. Lett. 102, 122116 (2013)CrossRef
21.
go back to reference M.L. Colussi, R.J. Baierle, R.H. Miwa, Doping effects of C, Si and Ge in wurtzite [0001] GaN, AlN, and InN nanowires. J. Appl. Phys. 110, 033709 (2011)CrossRef M.L. Colussi, R.J. Baierle, R.H. Miwa, Doping effects of C, Si and Ge in wurtzite [0001] GaN, AlN, and InN nanowires. J. Appl. Phys. 110, 033709 (2011)CrossRef
22.
go back to reference S. Özen, V. Şenay, S. Pat, Ş. Korkmaz, Morphological and optical comparison of the Si doped GaN thin film deposited onto the transparent substrates. Mater. Res. Express 3, 045012 (2016)CrossRef S. Özen, V. Şenay, S. Pat, Ş. Korkmaz, Morphological and optical comparison of the Si doped GaN thin film deposited onto the transparent substrates. Mater. Res. Express 3, 045012 (2016)CrossRef
23.
go back to reference N. Zographos, A. Erlebach, Process simulation of dopant diffusion and activation in germanium. Phys. Status Solidi (a) 211, 143–146 (2014)CrossRef N. Zographos, A. Erlebach, Process simulation of dopant diffusion and activation in germanium. Phys. Status Solidi (a) 211, 143–146 (2014)CrossRef
24.
go back to reference T. Tsukamoto, N. Hirose, A. Kasamatsu, T. Mimura, T. Matsui, Y. Suda, Effects of boron dopants of Si (001) substrates on formation of Ge layers by sputter epitaxy method. Appl. Phys. Lett. 103, 172103 (2013)CrossRef T. Tsukamoto, N. Hirose, A. Kasamatsu, T. Mimura, T. Matsui, Y. Suda, Effects of boron dopants of Si (001) substrates on formation of Ge layers by sputter epitaxy method. Appl. Phys. Lett. 103, 172103 (2013)CrossRef
25.
go back to reference H.T. Chen, Y.F. Cheung, H.W. Choi, S.C. Tan, S. Hui, Reduction of thermal resistance and optical power loss using thin-film light-emitting diode (LED) structure. Ind Electron IEEE Trans 62, 6925–6933 (2015)CrossRef H.T. Chen, Y.F. Cheung, H.W. Choi, S.C. Tan, S. Hui, Reduction of thermal resistance and optical power loss using thin-film light-emitting diode (LED) structure. Ind Electron IEEE Trans 62, 6925–6933 (2015)CrossRef
26.
go back to reference L. Foglia, L. Bogner, M. Wolf, J. Stähler, Localization-dependent charge separation efficiency at an organic/inorganic hybrid interface. Chem. Phys. Lett. 646, 25–30 (2016)CrossRef L. Foglia, L. Bogner, M. Wolf, J. Stähler, Localization-dependent charge separation efficiency at an organic/inorganic hybrid interface. Chem. Phys. Lett. 646, 25–30 (2016)CrossRef
27.
go back to reference C. Han, Y. Du, X. Meng, F. Wu, Y. Fang, Enhancement of up-conversion emissions in ZnO: Er3+–Yb3+ after Gd2 O3 surface modification. Appl. Surf. Sci. 274, 60–63 (2013)CrossRef C. Han, Y. Du, X. Meng, F. Wu, Y. Fang, Enhancement of up-conversion emissions in ZnO: Er3+–Yb3+ after Gd2 O3 surface modification. Appl. Surf. Sci. 274, 60–63 (2013)CrossRef
28.
go back to reference J.F. Sánchez-Royo, G. Muñoz-Matutano, M. Brotons-Gisbert, J.P. Martínez-Pastor, A. Segura, A. Cantarero, R. Mata, J. Canet-Ferrer, G. Tobias, E. Canadell, Electronic structure, optical properties, and lattice dynamics in atomically thin indium selenide flakes. Nano Res. 7, 1556–1568 (2014)CrossRef J.F. Sánchez-Royo, G. Muñoz-Matutano, M. Brotons-Gisbert, J.P. Martínez-Pastor, A. Segura, A. Cantarero, R. Mata, J. Canet-Ferrer, G. Tobias, E. Canadell, Electronic structure, optical properties, and lattice dynamics in atomically thin indium selenide flakes. Nano Res. 7, 1556–1568 (2014)CrossRef
29.
go back to reference J.-H. Yang, L. Shi, L.-W. Wang, S.-H. Wei, Non-radiative carrier recombination enhanced by two-level process: a first-principles study. Sci. Rep. 6, 21712 (2016)CrossRef J.-H. Yang, L. Shi, L.-W. Wang, S.-H. Wei, Non-radiative carrier recombination enhanced by two-level process: a first-principles study. Sci. Rep. 6, 21712 (2016)CrossRef
30.
go back to reference I.-H. Lee, J. Lee, P. Kung, F. Sanchez, M. Razeghi, Band-gap narrowing and potential fluctuation in Si-doped GaN. Appl. Phys. Lett. 74, 102–104 (1999)CrossRef I.-H. Lee, J. Lee, P. Kung, F. Sanchez, M. Razeghi, Band-gap narrowing and potential fluctuation in Si-doped GaN. Appl. Phys. Lett. 74, 102–104 (1999)CrossRef
31.
go back to reference M. Feneberg, S. Osterburg, K. Lange, C. Lidig, B. Garke, R. Goldhahn, E. Richter, C. Netzel, M.D. Neumann, N. Esser, Band gap renormalization and Burstein–Moss effect in silicon- and germanium-doped wurtzite GaN up to 1020 cm−3. Phys. Rev. B 90, 075203 (2014)CrossRef M. Feneberg, S. Osterburg, K. Lange, C. Lidig, B. Garke, R. Goldhahn, E. Richter, C. Netzel, M.D. Neumann, N. Esser, Band gap renormalization and Burstein–Moss effect in silicon- and germanium-doped wurtzite GaN up to 1020 cm−3. Phys. Rev. B 90, 075203 (2014)CrossRef
32.
go back to reference M. Huang, A. Dumon, C.-W. Nan, Effect of Si, In and Ge doping on high ionic conductivity of Li7La3Zr2O12. Electrochem. Commun. 21, 62–64 (2012)CrossRef M. Huang, A. Dumon, C.-W. Nan, Effect of Si, In and Ge doping on high ionic conductivity of Li7La3Zr2O12. Electrochem. Commun. 21, 62–64 (2012)CrossRef
33.
go back to reference S. Özen, V. Şenay, S. Pat, Ş. Korkmaz, Optical, morphological properties and surface energy of the transparent Li4Ti5O12 (LTO) thin film as anode material for secondary type batteries. J. Phys. D Appl. Phys. 49, 105303 (2016)CrossRef S. Özen, V. Şenay, S. Pat, Ş. Korkmaz, Optical, morphological properties and surface energy of the transparent Li4Ti5O12 (LTO) thin film as anode material for secondary type batteries. J. Phys. D Appl. Phys. 49, 105303 (2016)CrossRef
34.
go back to reference D. Herman, J. Sicha, J. Musil, Magnetron sputtering of TiOxNy films. Vacuum 81, 285–290 (2006)CrossRef D. Herman, J. Sicha, J. Musil, Magnetron sputtering of TiOxNy films. Vacuum 81, 285–290 (2006)CrossRef
35.
go back to reference M. Zhang, P. Bhattacharya, W. Guo, InGaN/GaN self-organized quantum dot green light emitting diodes with reduced efficiency droop. Appl. Phys. Lett. 97, 011103 (2010)CrossRef M. Zhang, P. Bhattacharya, W. Guo, InGaN/GaN self-organized quantum dot green light emitting diodes with reduced efficiency droop. Appl. Phys. Lett. 97, 011103 (2010)CrossRef
36.
go back to reference I.-K. Park, S.-J. Park, Green gap spectral range light-emitting diodes with self-assembled InGaN quantum dots formed by enhanced phase separation. Appl. Phys. Express 4, 042102 (2011)CrossRef I.-K. Park, S.-J. Park, Green gap spectral range light-emitting diodes with self-assembled InGaN quantum dots formed by enhanced phase separation. Appl. Phys. Express 4, 042102 (2011)CrossRef
37.
go back to reference J. Brown, F. Wu, P. Petroff, J. Speck, GaN quantum dot density control by rf-plasma molecular beam epitaxy. Appl. Phys. Lett. 84, 690–692 (2004)CrossRef J. Brown, F. Wu, P. Petroff, J. Speck, GaN quantum dot density control by rf-plasma molecular beam epitaxy. Appl. Phys. Lett. 84, 690–692 (2004)CrossRef
Metadata
Title
The substrate effect on Ge doped GaN thin films coated by thermionic vacuum arc
Authors
Soner Özen
Şadan Korkmaz
Volkan Şenay
Suat Pat
Publication date
02-09-2016
Publisher
Springer US
Published in
Journal of Materials Science: Materials in Electronics / Issue 2/2017
Print ISSN: 0957-4522
Electronic ISSN: 1573-482X
DOI
https://doi.org/10.1007/s10854-016-5657-0

Other articles of this Issue 2/2017

Journal of Materials Science: Materials in Electronics 2/2017 Go to the issue