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Published in:
28-11-2014
Through-thickness texture gradient of tantalum sputtering target
Published in: Rare Metals | Issue 6/2017
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Abstract
For sputtering targets, through-thickness texture is critical for assuring reliable sputtering performance. In this paper, through-thickness texture gradient of a rolled and subsequently annealed tantalum sputtering target was investigated. The results show that by carefully controlling the rolling process, shear-related components at the surface of the rolled sample could be avoided. Both the rolled sample and the annealed target develop a through-thickness texture gradient with the formation of a stronger {1 1 1} fiber in the center layer compared with that in the surface layer.