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Journal of Electronic Materials
Published in: Journal of Electronic Materials 9/2009

01-09-2009

Two Layer Surface Exfoliation on Si3N4/Si by Sequential Implantation of He and H Ions

Authors: Mengkai Li, Zhuo Wang, Changlong Liu, Junqi Liao, Yanyan Shen, Lili Zhang, Bing Yuan

Published in: Journal of Electronic Materials | Issue 9/2009

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Metadata
Title
Two Layer Surface Exfoliation on Si3N4/Si by Sequential Implantation of He and H Ions
Authors
Mengkai Li
Zhuo Wang
Changlong Liu
Junqi Liao
Yanyan Shen
Lili Zhang
Bing Yuan
Publication date
01-09-2009
Publisher
Springer US
Published in
Journal of Electronic Materials / Issue 9/2009
Print ISSN: 0361-5235
Electronic ISSN: 1543-186X
DOI
https://doi.org/10.1007/s11664-009-0768-5

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