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2011 | OriginalPaper | Chapter

7. X-Ray Energy-Dispersive Spectrometry in Scanning Transmission Electron Microscopes

Author : Masashi Watanabe

Published in: Scanning Transmission Electron Microscopy

Publisher: Springer New York

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Abstract

Recently developed aberration correctors have brought significant improvements in materials characterization. In aberration-corrected scanning transmission electron microscopy (STEM), the incident probe dimensions can be refined significantly, and image resolution has already reached sub-angstrom levels in high-angle annular dark-field (HAADF) STEM imaging (Batson et al. 2002, Nellist et al. 2004). In addition, materials characterization at the atomic level can routinely be performed by electron energy-loss spectrometry (EELS) in aberration-corrected STEM (e.g. Varela et al. 2005). The aberration correction of the incident beam is also very useful for X-ray energy-dispersive spectrometry (XEDS) because the spatial resolution can be dramatically improved with the refined probe (Watanabe et al. 2006).

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Title: X-Ray Energy-Dispersive Spectrometry in Scanning Transmission Electron Microscopes
Author: Masashi Watanabe
Publisher: Springer New York
Book: Scanning Transmission Electron Microscopy
Print ISBN: 978-1-4419-7199-9

Electronic ISBN: 978-1-4419-7200-2

Copyright Year: 2011
DOI: https://doi.org/10.1007/978-1-4419-7200-2_7