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Microsystem Technologies
Published in: Microsystem Technologies 10-11/2014

01-10-2014 | Technical Paper

2N Period submicron grating at the inner wall of a metal cylinder

Authors: H. Hirshy, S. G. Scholz, Y. Jourlin, S. Tonchev, S. Reynaud, A. Boukenter, O. Parriaux

Published in: Microsystem Technologies | Issue 10-11/2014

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Abstract

The aim of the present contribution is to set up and demonstrate the chain of processes leading to the Ni-master of a circular cylinder having an integer number of long grating lines of submicron period at its wall. Microelectronics 2D microstructuring technologies were adapted in order to print a photoresist integer period number on a glass cylinder flank by the projection of a radial planar phase-mask grating. The next step is the galvanic growth of nickel on the photoresist corrugation. Subsequently, the manufacturing of cylindrical gratings will be enabled by an injection moulding process.
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Literature
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Tonchev S, Jourlin Y, Reynaud S, Guttmann M, Wissmann M, Krajewski R, Joswik M (2008) Photolithography of variable depth gratings on a polymer substrate for the mastering of 3D diffractive optical elements. In: 14th Microoptics conference (MOC ‘08). Brussels, Belgium
Tonchev S, Jourlin Y, Reynaud S, Parriaux O (2012) Cylindrical grating projection by single-shot normal exposure of a radial phase mask. IEEE Photonics J 4:1170–1177CrossRef
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Metadata
Title
2N Period submicron grating at the inner wall of a metal cylinder
Authors
H. Hirshy
S. G. Scholz
Y. Jourlin
S. Tonchev
S. Reynaud
A. Boukenter
O. Parriaux
Publication date
01-10-2014
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 10-11/2014
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-013-1949-y

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