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Microsystem Technologies

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01-12-2014 | Review Paper

A comprehensive study on RF MEMS switch

Authors: H. Jaafar, K. S. Beh, N. A. M. Yunus, W. Z. W. Hasan, S. Shafie, O. Sidek

Published in: Microsystem Technologies | Issue 12/2014

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Abstract

This paper emphasis on state-of-the-art of the earlier until the current trend and demand, principles, design considerations, key performance and fabrication technology of RF MEMS switch devices developed over the past few years. RF MEMS switch performance and features such as actuation voltage, insertion loss, isolation and ease with cost of fabrication and applications are compared and discussed.

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Title: A comprehensive study on RF MEMS switch
Authors: H. Jaafar
K. S. Beh
N. A. M. Yunus
W. Z. W. Hasan
S. Shafie
O. Sidek
Publication date: 01-12-2014
Publisher: Springer Berlin Heidelberg
Published in: Microsystem Technologies / Issue 12/2014
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-014-2276-7

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