Skip to main content

Microsystem Technologies

Ausgabe 12/2014

Inhalt (23 Artikel)

Review Paper

A comprehensive study on RF MEMS switch

H. Jaafar, K. S. Beh, N. A. M. Yunus, W. Z. W. Hasan, S. Shafie, O. Sidek

Review Paper

Micro rate gyros for highly dynamic objects

Dmitry Lukyanov, Sergey Shevchenko, Alexander Kukaev

Technical Paper

Study on frequency stability of a linear-vibration MEMS gyroscope

Wei Wang, Tingkai Zhang, Dongqing Fan, Chaoyang Xing

Technical Paper

Dual-axis tuning fork vibratory gyroscope with anti-phase mode vibration mechanism

Sheng-Ren Chiu, Chung-Yang Sue, Chih-Hsiou Lin, Yan-Kuin Su

Technical Paper

A novel method to overcome photoresist collapse with high aspect ratio structures

Mingyan Yu, Shirui Zhao, Chaoqun Gao, Xiaolong Guo, Xinwei Xu, Yunbo Shi, Yupeng Jing, Baoqin Chen

Technical Paper

Patterning of burnishing head for hard disk platters by synchrotron radiation lithography

Komgrit Leksakul, Chalinee Maneekat, Rungrueang Phatthanakun

Open Access Technical Paper

Design, simulation, fabrication and characterization of novel single use MEMS resistor controllers

Wenzhong Lou, Peng Liu, Yue Zhao, Xuran Ding

Technical Paper

Fabrication of AFM probe with CuO nanowire formed by stress-induced method

Atsushi Hosoi, Hisataka Koto, Yang Ju

Technical Paper

Novel self-compensation method to lower the temperature drift of a quartz MEMS gyroscope

Lihui Feng, Wenjun Gu, Ke Zhao, Yu-nan Sun, Fang Cui, Jianmin Cui, Aiying Yang

Technical Paper

Micromachined pyramidal shaped biodegradable microneedle and its skin penetration capability

Mitsuhiro Shikida, Shingo Kitamura, Chikara Miyake, Katsuhiko Bessho

Technical Paper

Development of reel-to-reel microchip mounting system for fabrication of meter-long LED lighting tapes

Seiichi Takamatsu, Takahiro Yamashita, Toshihiro Itoh

Technical Paper

Investigation of surface roughness effects on fluid flow in passive micromixer

Gaurav Pendharkar, Raghavendra Deshmukh, Rajendra Patrikar

Technical Paper

Novel piezoelectric actuator control slider using transverse-mode deformation

Shengnan Shen, Hui Li, Hejun Du, Bo Liu

Technical Paper

A low cost, high performance insulin delivery system based on PZT actuation

Guojun Liu, Zhigang Yang, Jianfang Liu, Xinbo Li, Hao Wang, Tian Zhao, Xuelu Yang

Technical Paper

Design and implementation of a 700–2,600 MHz RF SiP module for micro base station

Yi He, Fengman Liu, Fengze Hou, Peng Wu, Jun Li, Liqiang Cao, Dongkai Shangguan

Erratum

Erratum to: Design and implementation of a 700–2,600 MHz RF SiP module for micro base station

Yi He, Fengman Liu, Fengze Hou, Peng Wu, Jun Li, Liqiang Cao, Dongkai Shangguan

Neuer Inhalt