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Microsystem Technologies
Erschienen in: Microsystem Technologies 12/2014

01.12.2014 | Technical Paper

Fabrication of various nano-structured nickel stamps using anodic aluminum oxide

verfasst von: Jang Min Park

Erschienen in: Microsystem Technologies | Ausgabe 12/2014

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Abstract

This paper presents a fabrication method of various nickel stamps based on anodic aluminum oxide (AAO) and nickel electroforming (NE) processes. By AAO process, master templates which have closely-packed nano dimple or pore structure array are fabricated. Then nickel stamps having negative surface topology of the master templates are fabricated by NE process. Also positive nickel stamps are fabricated from the negative stamps by NE process with the help of nickel passivation technique. So achieved nickel stamps are employed in injection molding and hot embossing processes for replication of nano-structured surfaces.
Vorheriger Artikel Study on frequency stability of a linear-vibration MEMS gyroscope
Nächster Artikel PZT length optimization of MEMS piezoelectric energy harvester with a non-traditional cross section: simulation study

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Metadaten
Titel
Fabrication of various nano-structured nickel stamps using anodic aluminum oxide
verfasst von
Jang Min Park
Publikationsdatum
01.12.2014
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 12/2014
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-014-2094-y

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