Study on frequency stability of a linear-vibration MEMS gyroscope

Thermal-dependent frequency stability of a linear-vibration gyroscope, based on elastic theory of thin plate, is studied. As an elastic structure, the resonant frequency of the gyroscope is determined by the secant coefficient of thermal expansion of the material in which the gyroscope is made. For decreasing the frequency variation under different temperatures, the gyroscope can be changed in its structure to eliminate the thermal stress caused by mismatch of materials the gyroscope made in. Two gyroscopes with straight-beam and folded-beam supporting respectively are designed and analyzed. When replacing straight-beam by folded-beam in the gyroscope, the frequency variation of the gyroscope decreases. The two structures then are manufactured for testing. The testing shows the same result as analysis.