Top

Microsystem Technologies

Published in:

21-07-2022 | Technical Paper

A lead-free flexible energy harvesting device

Authors: Rajinder Singh Deol, Nitika Batra, Pranjal Rai, Henam Sylvia Devi, Bhaskar Mitra, Madhusudan Singh

Published in: Microsystem Technologies | Issue 9/2022

Activate our intelligent search to find suitable subject content or patents.

search-config

AI-assisted search

Off

Abstract

A metal-piezo-metal (M\(\pi \)M) based single-pixel (sensing element or energy harvester) 1 \(\times \) 1 cm energy harvester was fabricated using solution-processed potassium sodium niobate films on aluminum-coated polyethylene terephthalate (PET) substrates. Initial measurements using a full-wave diode bridge rectifier circuit show a real-time response time of (\(\sim \)0.13 s) on the application of variable pressure. The magnitude of the voltage signal generated is \(\sim \) 40 mV greater than the expected rectification drop of \(\sim \) 1.4 V, suggesting significant charge transduction in the harvester.

previous article Sub-6 GHz band massive MIMO antenna system for variable deployment scenarios in 5G base stations

next article Design and fabrication of micromanipulation tools for electrochemical-based manipulation of metal microcomponents

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

über 102.000 Bücher
über 537 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Finance + Banking
Management + Führung
Marketing + Vertrieb
Maschinenbau + Werkstoffe
Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

inform now

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

über 67.000 Bücher
über 390 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Maschinenbau + Werkstoffe

Jetzt Wissensvorsprung sichern!

inform now

Available only for authorised users

Ahn J, Kim D, Yeom G, Yoo J, Lee J (2001) Fabrication and properties of microcantilever using piezoelectric PZT thin films. Ferroelectrics 263(1):241–246. https://doi.org/10.1080/00150190108225206 (ISSN 0015-0193)CrossRef

Ahn CW, Lee SY, Lee HJ, Ullah A, Bae JS, Jeong ED, Choi JS, Park BH, Kim IW (2009) The effect of K and Na excess on the ferroelectric and piezoelectric properties of K0.5Na0.5NbO3 thin films. J Phys D Appl Phys 42(21):215304. https://doi.org/10.1088/0022-3727/42/21/215304 (ISSN 0022-3727)CrossRef

Algieri L, Todaro MT, Guido F, Mastronardi V, Desmaële D, Qualtieri A, Giannini C, Sibillano T, De Vittorio M (2018) Flexible piezoelectric energy-harvesting exploiting biocompatible AlN thin films grown onto spin-coated polyimide layers. ACS Appl Energy Mater 1(10):5203–5210. https://doi.org/10.1021/acsaem.8b00820CrossRef

Batra N, Singh M, Mitra B (2018) Parametric study of notch shaped cantilever beam for energy harvesting. In: 2018 IEEE sensors. pp 1–4. https://doi.org/10.1109/ICSENS.2018.8589767

Bowen CR, Kim HA, Weaver PM, Dunn S (2013) Piezoelectric and ferroelectric materials and structures for energy harvesting applications. Energy Environ Sci 7(1):25–44. https://doi.org/10.1039/C3EE42454E (ISSN 1754-5706)CrossRef

Cakare-Samardzija L, Malic B, Kosec M (2008) K0.5Na0.5NbO3 thin films prepared by chemical solution deposition. Ferroelectrics 370(1):113–118. https://doi.org/10.1080/00150190802384450 (ISSN 0015-0193)CrossRef

Chen X, Li X, Shao J, An N, Tian H, Wang C, Han T, Wang L, Lu B (2017) High-performance piezoelectric nanogenerators with imprinted P(VDF-TrFE)/BaTiO3 nanocomposite micropillars for self-powered flexible sensors. Small 13(23):1604245. https://doi.org/10.1002/smll.201604245 (ISSN 1613-6829)CrossRef

Choi HW, Zhou T, Singh M, Jabbour GE (2015) Recent developments and directions in printed nanomaterials. Nanoscale 7(8):3338–3355. https://doi.org/10.1039/C4NR03915G (ISSN 2040-3364, 2040-3372)CrossRef

Covaci C, Gontean A (2020) Piezoelectric energy harvesting solutions: a review. Sensors (Basel, Switzerland). https://doi.org/10.3390/s20123512 (ISSN 1424-8220)CrossRef

Dagdeviren C, Yang BD, Su Y, Tran PL, Joe P, Anderson E, Xia J, Doraiswamy V, Dehdashti B, Feng X, Lu B, Poston R, Khalpey Z, Ghaffari R, Huang Y, Slepian MJ, Rogers JA (2014) Conformal piezoelectric energy harvesting and storage from motions of the heart, lung, and diaphragm. Proc Natl Acad Sci 111(5):1927–1932. https://doi.org/10.1073/pnas.1317233111 (ISSN 0027-8424, 1091-6490)CrossRef

Dagdeviren C, Li Z, Wang ZL (2017) Energy harvesting from the animal/human body for self-powered electronics. Ann Rev Biomed Eng 19(1):85–108. https://doi.org/10.1146/annurev-bioeng-071516-044517 (ISSN 1523-9829)CrossRef

Deol RS, Choi HW, Singh M, Jabbour GE (2015) Printable displays and light sources for sensor applications: a review. IEEE Sens J 15(6):3186–3195. https://doi.org/10.1109/JSEN.2014.2378144 (ISSN 1558-1748)CrossRef

Deol RS, Mehra M, Mitra B, Singh M (2018) Low-temperature solution-processed sol-gel K-rich KNN thin films for flexible electronics. MRS Adv 3(5):269–275. https://doi.org/10.1557/adv.2018.78 (ISSN 2059-8521)CrossRef

Deol RS, Saha S, Batra N, Mitra B, Singh M (2021) Study of low temperature solution-processed amorphous KNN thin films using PFM. MRS Commun 11(5):554–558. https://doi.org/10.1557/s43579-021-00068-2 (ISSN 2159-6867)CrossRef

Deol RS, Batra N, Bhattacharya K, Devi HS, Mitra B, Singh M (2022) Extraction of electromechanical coefficients from capacitance-voltage measurements of unannealed solution-processed knn thin films: effects of frequency and electrostatic and mechanical deformation. Phys Status Solidi (A) 219(12):2100771. https://doi.org/10.1002/pssa.202100771 (ISSN 1862-6319)CrossRef

Ding Y, Duan Y, Huang Y (2015) Electrohydrodynamically printed, flexible energy harvester using in situ poled piezoelectric nanofibers. Energy Technol 3(4):351–358. https://doi.org/10.1002/ente.201402148 (ISSN 2194-4296)CrossRef

Dolhen M, Mahajan A, Pinho R, Costa ME, Trolliard G, Vilarinho PM (2014) Sodium potassium niobate (K0.5Na0.5NbO3, KNN) thick films by electrophoretic deposition. RSC Adv 5(6):4698–4706. https://doi.org/10.1039/C4RA11058G (ISSN 2046-2069)CrossRef

Fan FR, Tang W, Wang ZL (2016) Flexible nanogenerators for energy harvesting and self-powered electronics. Adv Mater 28(22):4283–4305. https://doi.org/10.1002/adma.201504299 (ISSN 1521-4095)CrossRef

Fei C, Liu X, Zhu B, Li D, Yang X, Yang Y, Zhou Q (2018) AlN piezoelectric thin films for energy harvesting and acoustic devices. Nano Energy 51:146–161. https://doi.org/10.1016/j.nanoen.2018.06.062 (ISSN 2211-2855)CrossRef

Goyer RA (1993) Lead toxicity: current concerns. Environ Health Perspect 100:177–187. https://doi.org/10.1289/ehp.93100177CrossRef

Guerin S, Tofail SAM, Thompson D (2019) Organic piezoelectric materials: milestones and potential. NPG Asia Mater 11(1):1–5. https://doi.org/10.1038/s41427-019-0110-5 (ISSN 1884-4057)CrossRef

Hong C-H, Kim H-P, Choi B-Y, Han H-S, Son JS, Ahn CW, Jo W (2016) Lead-free piezoceramics: where to move on? J Materiomics 2(1):1–24. https://doi.org/10.1016/j.jmat.2015.12.002CrossRef

Huo X, Zheng L, Zhang R, Wang R, Wang J, Sang S, Wang Y, Yang B, Cao W (2014) A high quality lead-free (Li, Ta) modified (K, Na)NbO3 single crystal and its complete set of elastic, dielectric and piezoelectric coefficients with macroscopic 4mm symmetry. CrystEngComm 16(42):9828–9833. https://doi.org/10.1039/C4CE01208A (ISSN 1466-8033)CrossRef

Hwang G-T, Park H, Lee J-H, SeKwon O, Park K-I, Byun M, Park H, Ahn G, Jeong CK, No K, Kwon HS, Lee S-G, Joung B, Lee KJ (2014) Self-powered cardiac pacemaker enabled by flexible single crystalline PMN-PT piezoelectric energy harvester. Adv Mater 26(28):4880–4887. https://doi.org/10.1002/adma.201400562 (ISSN 1521-4095)CrossRef

Jain A, Prashanth K, Asheesh J, Sharma K, Jain A, Rashmi PN (2015) Dielectric and piezoelectric properties of PVDF/PZT composites: a review. Polym Eng Sci 55(7):1589–1616. https://doi.org/10.1002/pen.24088 (ISSN 1548-2634)CrossRef

Jeong S, Foo Z, Lee Y, Sim J-Y, Blaauw D, Sylvester D (2014) A fully-integrated 71 nW CMOS temperature sensor for low power wireless sensor nodes. IEEE J Solid State Circuits 49(8):1682–1693. https://doi.org/10.1109/JSSC.2014.2325574 (ISSN 1558-173X)CrossRef

Kalimuldina G, Turdakyn N, Abay I, Medeubayev A, Nurpeissova A, Adair D, Bakenov Z (2020) A review of piezoelectric PVDF film by electrospinning and its applications. Sensors (Basel, Switzerland). https://doi.org/10.3390/s20185214 (ISSN 1424-8220)CrossRef

Kanno I, Ichida T, Adachi K, Kotera H, Shibata K, Mishima T (2012) Power-generation performance of lead-free (K, Na)NbO3 piezoelectric thin-film energy harvesters. Sens Actuators A Phys 179:132–136. https://doi.org/10.1016/j.sna.2012.03.003 (ISSN 0924-4247)CrossRef

Khanafer K, Duprey A, Schlicht M, Berguer R (2008) Effects of strain rate, mixing ratio, and stress-strain definition on the mechanical behavior of the polydimethylsiloxane (PDMS) material as related to its biological applications. Biomed Microdevices 11(2):503. https://doi.org/10.1007/s10544-008-9256-6 (ISSN 1572-8781)CrossRef

Kim S, Towfeeq I, Dong Y, Gorman S, Rao AM, Koley G (2018) P(VDF-TrFE) film on PDMS substrate for energy harvesting applications. Appl Sci 8(2):213. https://doi.org/10.3390/app8020213 (ISSN 2076-3417)CrossRef

Kovacova V, Yang JI, Jacques L, Yeo HG, Lanari V, Rahn C, Trolier-McKinstry S (2021) Comparison of K0.5Na0.5NbO3 and PbZr0.52Ti0.48O3 compliant-mechanism-design energy harvesters. J Appl Phys 129(11):114101. https://doi.org/10.1063/5.0037731 (ISSN 0021-8979)CrossRef

Kupec A, Malic B, Tellier J, Tchernychova E, Glinsek S, Kosec M (2012) Lead-free ferroelectric potassium sodium niobate thin films from solution: composition and structure. J Am Ceram Soc 95(2):515–523. https://doi.org/10.1111/j.1551-2916.2011.04892.x (ISSN 1551-2916)CrossRef

Lang GF, Snyder D (2001) Understanding the physics of electrodynamic shaker performance. Sound Vib 10:9

Lee Y, Blaauw D, Sylvester D (2016) Ultralow power circuit design for wireless sensor nodes for structural health monitoring. Proc IEEE 104(8):1529–1546. https://doi.org/10.1109/JPROC.2016.2547946 (ISSN 1558-2256)CrossRef

Lee G-J, Park E-K, Yang S-A, Park J-J, Bu S-D, Lee M-K (2017) Rapid and direct synthesis of complex perovskite oxides through a highly energetic planetary milling. Sci Rep 7(1):46241. https://doi.org/10.1038/srep46241 (ISSN 2045-2322)CrossRef

Lefeuvre E, Audigier D, Richard C, Guyomar D (2007) Buck-boost converter for sensorless power optimization of piezoelectric energy harvester. IEEE Trans Power Electron 22(5):2018–2025. https://doi.org/10.1109/TPEL.2007.904230 (ISSN 1941-0107)CrossRef

Li J-F, Wang K, Zhu F-Y, Cheng L-Q, Yao F-Z (2013) (K, Na)NbO3-based lead-free piezoceramics: fundamental aspects, processing technologies, and remaining challenges. J Am Ceram Soc 96(12):3677–3696. https://doi.org/10.1111/jace.12715 (ISSN 0002-7820)CrossRef

Li Q, Zhang M-H, Zhu Z-X, Wang K, Zhou J-S, Yao F-Z, Li J-F (2017) Poling engineering of (K, Na)NbO3-based lead-free piezoceramics with orthorhombic-tetragonal coexisting phases. J Mater Chem C 5(3):549–556. https://doi.org/10.1039/C6TC04723H (ISSN 2050-7534)CrossRef

Li C, Liu D, Xu C, Wang Z, Shu S, Sun Z, Tang W, Wang ZL (2021) Sensing of joint and spinal bending or stretching via a retractable and wearable badge reel. Nat Commun 12(1):2950. https://doi.org/10.1038/s41467-021-23207-8 (ISSN 2041-1723)CrossRef

Lim JB, Zhang S, Lee HJ, Jeon J-H, Shrout TR (2010) Shear-mode piezoelectric properties of modified-(K, Na)NbO3 ceramics for “Hard’’ lead-free materials. J Am Ceram Soc 93(9):2519–2521. https://doi.org/10.1111/j.1551-2916.2010.03870.x (ISSN 1551-2916)CrossRef

Lim W, Lee I, Sylvester D, Blaauw D (2015) 8.2 Batteryless Sub-nW Cortex-M0+ processor with dynamic leakage-suppression logic. In: 2015 IEEE international solid-state circuits conference-(ISSCC) digest of technical papers. pp 1–3. https://doi.org/10.1109/ISSCC.2015.7062968

Lütkenhöner B (2017) What the electrical impedance can tell about the intrinsic properties of an electrodynamic shaker. PLoS One 12(3):e0174184. https://doi.org/10.1371/journal.pone.0174184 (ISSN 1932-6203)CrossRef

Manikandan M, Rajagopalan P, Nandini Patra S, Jayachandran M. Muralidharan, Prabu SSM, Palani IA, Singh V (2020) Development of Sn-doped ZnO based ecofriendly piezoelectric nanogenerator for energy harvesting application. Nanotechnology 31(18):185401. https://doi.org/10.1088/1361-6528/ab6b9e (ISSN 0957-4484)CrossRef

Milhim AB, Ben-Mrad R (2016) Fabrication of lead-free piezoelectric (K, Na)NbO3 thin film on nickel-based electrodes. J Microelectromech Syst 25(2):320–325. https://doi.org/10.1109/JMEMS.2016.2515058 (ISSN 1057-7157)CrossRef

Nili H, Kandjani AE, Plessis JD, Bansal V, Kalantar-zadeh K, Sriram S, Bhaskaran M (2013) Alkali ratio control for lead-free piezoelectric thin films utilizing elemental diffusivities in RF plasma. CrystEngComm 15(36):7222–7229. https://doi.org/10.1039/C3CE40508G (ISSN 1466-8033)CrossRef

Núñez CG, Manjakkal L, Dahiya R (2019) Energy autonomous electronic skin. NPJ Flex Electron 3(1):1–24. https://doi.org/10.1038/s41528-018-0045-x (ISSN 2397-4621)CrossRef

Park K-I, Xu S, Liu Y, Hwang G-T, Kang S-JL, Wang ZL, Lee KJ (2010) Piezoelectric BaTiO3 thin film nanogenerator on plastic substrates. Nano Lett 10(12):4939–4943. https://doi.org/10.1021/nl102959k (ISSN 1530-6984)CrossRef

Park H, Lee D, Park G, Park S, Khan S, Kim J, Kim W (2019) Energy harvesting using thermoelectricity for IoT (Internet of Things) and E-skin sensors. J Phys Energy 1(4):042001. https://doi.org/10.1088/2515-7655/ab2f1e (ISSN 2515-7655)CrossRef

Pérez J, Joanni E, Vilarinho PM, Kholkin AL (2010) Thickness effect on the dielectric, ferroelectric, and piezoelectric properties of ferroelectric lead zirconate titanate thin films. J Appl Phys 108(11):114106. https://doi.org/10.1063/1.3514170 (ISSN 0021-8979)CrossRef

Persano L, Dagdeviren C, Su Y, Zhang Y, Girardo S, Pisignano D, Huang Y, Rogers JA (2013) High performance piezoelectric devices based on aligned arrays of nanofibers of poly(vinylidenefluoride-co-trifluoroethylene). Nat. Commun 4(1):1633. https://doi.org/10.1038/ncomms2639 (ISSN 2041-1723)CrossRef

Qi Y, McAlpine MC (2010) Nanotechnology-enabled flexible and biocompatible energy harvesting. Energy Environ Sci 3(9):1275–1285. https://doi.org/10.1039/C0EE00137F (ISSN 1754-5706)CrossRef

Ren X, Fan H, Zhao Y, Liu Z (2016) Flexible lead-free BiFeO3/PDMS-based nanogenerator as piezoelectric energy harvester. ACS Appl Mater Interfaces 8(39):26190–26197. https://doi.org/10.1021/acsami.6b04497 (ISSN 1944-8244)CrossRef

Rezaei M, Lueke J, Raboud D, Moussa W (2013) Challenges in fabrication and testing of piezoelectric MEMS with a particular focus on energy harvesters. Microsyst Technol 19(8):1195–1219. https://doi.org/10.1007/s00542-012-1721-8 (ISSN 1432-1858)CrossRef

Rödel J, Li J-F (2018) Lead-free piezoceramics: status and perspectives. MRS Bull 43(8):576–580. https://doi.org/10.1557/mrs.2018.181 (ISSN 0883-7694, 1938-1425)CrossRef

Rödig T, Schönecker A, Gerlach G (2010) A survey on piezoelectric ceramics for generator applications. J Am Ceram Soc 93(4):901–912. https://doi.org/10.1111/j.1551-2916.2010.03702.x (ISSN 1551-2916)CrossRef

Rubio-Marcos F, Romero JJ, Ochoa DA, García JE, Perez R, Fernandez JF (2009) Effects of poling process on KNN-modified piezoceramic properties. J Am Ceram Soc 93(2):318–321. https://doi.org/10.1111/j.1551-2916.2009.03404.x (ISSN 0002-7820)CrossRef

Safaei M, Sodano HA, Anton SR (2019) A review of energy harvesting using piezoelectric materials: state-of-the-art a decade later (2008–2018). Smart Mater Struct 28(11):113001. https://doi.org/10.1088/1361-665X/ab36e4 (ISSN 0964-1726)CrossRef

Sappati KK, Bhadra S (2018) Piezoelectric polymer and paper substrates: a review. Sensors 18(11):3605. https://doi.org/10.3390/s18113605CrossRef

Shrout TR, Zhang SJ (2007) Lead-free piezoelectric ceramics: alternatives for PZT? J Electroceram 19(1):113–126. https://doi.org/10.1007/s10832-007-9047-0 (ISSN 1573-8663)CrossRef

Tao K, Wu J, Kottapalli AGP, Tang LH, Hu LX, Wang N, Lye SW, Triantafyllou MS, Miao JM (2017) Electrostatic/triboelectric hybrid power generator using folded electrets. In: 2017 IEEE 30th international conference on micro electro mechanical systems (MEMS). pp 45–48. https://doi.org/10.1109/MEMSYS.2017.7863335

Toshiyoshi H, Ju S, Honma H, Ji C-H, Fujita H (2019) MEMS vibrational energy harvesters. Sci Technol Adv Mater 20(1):124–143. https://doi.org/10.1080/14686996.2019.1569828 (ISSN 1468-6996)CrossRef

Trung TQ, Lee N-E (2016) Flexible and stretchable physical sensor integrated platforms for wearable human-activity monitoringand personal healthcare. Adv Mater 28(22):4338–4372. https://doi.org/10.1002/adma.201504244 (ISSN 1521-4095)CrossRef

Wan Y, Wang Y, Guo CF (2017) Recent progresses on flexible tactile sensors. Mater Today Phys 1:61–73. https://doi.org/10.1016/j.mtphys.2017.06.002 (ISSN 2542-5293)CrossRef

Wang JJ, Hsieh JM, Tsai RW, Su YC(2011) Piezoelectric PDMS films for power MEMS. In: 2011 16th international solid-state sensors, actuators and microsystems conference. pp 2622–2625. https://doi.org/10.1109/TRANSDUCERS.2011.5969868

Wei H, Wang H, Xia Y, Cui D, Shi Y, Dong M, Liu C, Ding T, Zhang J, Ma Y, Wang N, Wang Z, Sun Y, Wei R, Guo Z (2018) An overview of lead-free piezoelectric materials and devices. J Mater Chem C 6(46):12446–12467. https://doi.org/10.1039/C8TC04515A (ISSN 2050-7534)CrossRef

Wu J (2020) Perovskite lead-free piezoelectric ceramics. J Appl Phys 127(19):190901. https://doi.org/10.1063/5.0006261 (ISSN 0021-8979)CrossRef

Xu C, Song Y, Han M, Zhang H (2021) Portable and wearable self-powered systems based on emerging energy harvesting technology. Microsyst Nanoeng 7(1):1–14. https://doi.org/10.1038/s41378-021-00248-z (ISSN 2055-7434)CrossRef

Yang T, Xie D, Li Z, Zhu H (2017) Recent advances in wearable tactile sensors: materials, sensing mechanisms, and device performance. Mater Sci Eng R Rep 115:1–37. https://doi.org/10.1016/j.mser.2017.02.001 (ISSN 0927-796X)CrossRef

Zastrow M (2019) Energy harvesters pick up power. Nature 576(7786):S38–S39. https://doi.org/10.1038/d41586-019-03767-yCrossRef

Zhang G, Zhao P, Zhang X, Han K, Zhao T, Zhang Y, Jeong CK, Jiang S, Zhang S, Wang Q (2018) Flexible three-dimensional interconnected piezoelectric ceramic foam based composites for highly efficient concurrent mechanical and thermal energy harvesting. Energy Environ Sci 11(8):2046–2056. https://doi.org/10.1039/C8EE00595H (ISSN 1754-5706)CrossRef

Zhou H, Zhang Y, Qiu Y, Wu H, Qin W, Liao Y, Yu Q, Cheng H (2020) Stretchable piezoelectric energy harvesters and self-powered sensors for wearable and implantable devices. Biosens Bioelectron 168:112569. https://doi.org/10.1016/j.bios.2020.112569 (ISSN 0956-5663)CrossRef

Title: A lead-free flexible energy harvesting device
Authors: Rajinder Singh Deol
Nitika Batra
Pranjal Rai
Henam Sylvia Devi
Bhaskar Mitra
Madhusudan Singh
Publication date: 21-07-2022
Publisher: Springer Berlin Heidelberg
Published in: Microsystem Technologies / Issue 9/2022
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-022-05345-1

Springer Professional

Abstract

Please log in to get access to your license.

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Springer Professional "Technik"

Other articles of this Issue 9/2022

A wearable omnidirectional inertial switch of security detection for the elderly

Very small size capacitive DMTL phase shifters using a new approach

High sensitivity Ge-source L-shaped tunnel BioFETs for detection of high-K biomolecules

Experiment and analysis of a piezoelectric energy harvester based on combined FEM modeling and spice simulation

New star-fractal antenna devised as wireless sensor of the permittivity characterization measurement of Na2SO3 solutions

Design and fabrication of micromanipulation tools for electrochemical-based manipulation of metal microcomponents