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Microsystem Technologies

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05-08-2022 | Technical Paper

Design and fabrication of micromanipulation tools for electrochemical-based manipulation of metal microcomponents

Authors: Dongjie Li, Fuyue Zhang, Liang Sun, Zhiqian Fan

Published in: Microsystem Technologies | Issue 9/2022

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Abstract

Micromanipulation tools are the basis for the development of micromanipulation technology. The problem of reliable, accurate, and non-destructive manipulation of micro-components using manipulation tools smaller than the object’s size is still unsolved. In this paper, a micro-manipulation tool for electrochemical-based manipulation of metal micro-components was designed and fabricated. Firstly, by theoretical analysis, the appropriate micropipette shape and nozzle size are derived. Then, with the finite element simulations and experiments, the pulling process effects of current, pull force, pulling velocity and cooling time on nozzle diameter are analyzed. Finally, the pipette nozzle diameters are set as the target value, the pulling parameters are optimized using the combination of the adaptive genetic algorithm and BP (Back Propagation) neural network. Through experimental verification of Optimal Parameters, the maximum error of the diameters of the pipette nozzle is only 0.84%. The micromanipulation tool can reliably and accurately manipulate objects larger than its size, and has high efficiency.

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Title: Design and fabrication of micromanipulation tools for electrochemical-based manipulation of metal microcomponents
Authors: Dongjie Li
Fuyue Zhang
Liang Sun
Zhiqian Fan
Publication date: 05-08-2022
Publisher: Springer Berlin Heidelberg
Published in: Microsystem Technologies / Issue 9/2022
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-022-05346-0

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