A New Type Surface Ionization Source with an Additional Mode of Electrohydrodynamic Ionization for SIMS

The secondary ion mass spectrometry(SIMS) is widely used as a powerful technique for surface analysis. Although SIMS shows a very high sensitivity for many elements by using positive or negative ion emissions from the specimen(l), its spatial resolution is limited mainly by the source size of the ion gun with such a type as the duoplasmatron or the surface ionization with a porous W flat emitter. Thus, we developed a new type ion source with a small source size which can be used in two modes, either surface ionization or electrohydrodynamic(EHD).