A Study on Argon Ion Gun in SIMS

In order to use SIMS for static state, sweeping and composition profiling analysis on specimen, an ion source of electron impact ionization type with beam-forming electrode [1,2] is investigated, besides the potential distribution in the ion source and ion trajectories in the exit system are calculated using numerical method. The results show that this ion source is capable to produce a beam with small initial energy spread and high ion yield, then a small ion beam spot could be obtained by means of suitable ion optical system and filter.