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Microsystem Technologies
Published in: Microsystem Technologies 2-3/2005

01-02-2005

A novel tuning fork gyroscope with high Q-factors working at atmospheric pressure

Authors: Y. Chen, J. Jiao, B. Xiong, L. Che, X. Li, Y. Wang

Published in: Microsystem Technologies | Issue 2-3/2005

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previous article Tuning the quality factor of bulk micromachined structures using squeezed-film damping
next article A new pre-etching pattern to determine 〈110〉 crystallographic orientation on both (100) and (110) silicon wafers

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Metadata
Title
A novel tuning fork gyroscope with high Q-factors working at atmospheric pressure
Authors
Y. Chen
J. Jiao
B. Xiong
L. Che
X. Li
Y. Wang
Publication date
01-02-2005
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 2-3/2005
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-004-0438-8

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Tuning the quality factor of bulk micromachined structures using squeezed-film damping