Ausgabe 2-3/2005
Inhalt (21 Artikel)
High temperature resistant antireflective moth-eye structures for infrared radiation sensors
T. Glaser, A. Ihring, W. Morgenroth, N. Seifert, S. Schröter, V. Baier
Electrical detection of DNA hybridization with multilayer gold nanoparticles between nanogap electrodes
C.-Y. Tsai, Y.-H. Tsai, C.-C. Pun, B. Chan, T.-Y. Luh, C.-C. Chen, F.-H. Ko, P.-J. Chen, P.-H. Chen
Two-dimensional stress measurement of a micromachined piezoresistive structure with micro-Raman spectroscopy
J. Qian, T.-X. Yu, Y.-P. Zhao
A novel tuning fork gyroscope with high Q-factors working at atmospheric pressure
Y. Chen, J. Jiao, B. Xiong, L. Che, X. Li, Y. Wang
The evaporated metal masks for chemical glass etching for BioMEMS
Y. Mourzina, A. Steffen, A. Offenhäusser
Bulk micromachining fabrication platform using the integration of DRIE and wet anisotropic etching
Huai-Yuan Chu, Weileun Fang
Laser scanning path generation considering photopolymer solidification in micro-stereolithography
Y. H. Cho, I. H. Lee, D.-W. Cho
3D Optical microstructure fabrication and its bonding to micro IR detector using elastomeric polymer
Jong-Yeon Park, Kun-Tae Kim, Hyun-Joon Shin, Sung Moon, James Jungho Pak
Metallic microstructures by electroforming from conducting polymer templates
N. Holstein, G. Schanz, J. Konys, V. Piotter, R. Ruprecht
Laser beam soldering – a new assembly technology for microoptical systems
H. Banse, E. Beckert, R. Eberhardt, W. Stöckl, J. Vogel
A self-aligned fabrication method of dual comb drive using multilayers SOI process for optical MEMS applications
W. T. Lin, J. C. Chiou, C. Tsou
Injection molding of 3D microstructures by μPIM
B.Y. Tay, L. Liu, N.H. Loh, S.B. Tor, Y. Murakoshi, R. Maeda
A robust and reliable stress-induced self-assembly supporting mechanism for optical devices
Y.-P. Ho, M. Wu, H.-Y. Lin, W. Fang
Overcoming SU-8 stiction in high aspect ratio structures
A. G. Peele, B. Y. Shew, K. D. Vora, H. C. Li