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Semiconductors
Published in: Semiconductors 5/2014

01-05-2014 | Semiconductor Structures, Low-Dimensional Systems, and Quantum Phenomena

Anomalous distribution of germanium implanted into a SOI dielectric layer after the annealing of radiation defects

Authors: E. L. Pankratov, O. P. Gus’kova, M. N. Drozdov, N. D. Abrosimova, V. M. Vorotyntsev

Published in: Semiconductors | Issue 5/2014

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Metadata
Title
Anomalous distribution of germanium implanted into a SOI dielectric layer after the annealing of radiation defects
Authors
E. L. Pankratov
O. P. Gus’kova
M. N. Drozdov
N. D. Abrosimova
V. M. Vorotyntsev
Publication date
01-05-2014
Publisher
Pleiades Publishing
Published in
Semiconductors / Issue 5/2014
Print ISSN: 1063-7826
Electronic ISSN: 1090-6479
DOI
https://doi.org/10.1134/S1063782614050170

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