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Microsystem Technologies
Published in: Microsystem Technologies 4-5/2014

01-04-2014 | Technical Paper

Compact optical position feedback scheme for MOEMS mirrors

Authors: Andreas Tortschanoff, M. Baumgart, D. Holzmann, M. Lenzhofer, T. Sandner, A. Kenda

Published in: Microsystem Technologies | Issue 4-5/2014

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Abstract

Recently, we have realized a novel, very compact position sensing device for MOEMS mirrors, which is based on the measurement of a reflected light beam with a quadrant diode. This scheme is applicable to arbitrary trajectories and in this work we present the characteristics of this device, showing experimental results obtained with a test set-up, but also theoretical considerations and optical ray-tracing simulations.
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Literature
Baumgart M, Tortschanoff A (2013a) Theoretical aspects in the design of optical angular position sensing of tiltable mirrors. Int J Optomechatronics 7:193CrossRef
Baumgart M, Tortschanoff A (2013b) Design rules for a compact and low-cost optical position sensing of MOEMS tilt mirrors based on a Gaussian-shaped light source. Proc SPIE 8789:87890ACrossRef
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Jung D, Sandner T, Kallweit D, Schenk H (2012) Vertical comb drive microscanners for beam steering, linear scanning and laser projection applications. Proc SPIE 8252:82520UCrossRef
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Milanovic V, Matus GA, McCormick DT (2004) Gimbal-less monolithic silicon actuators for tip-tilt-piston micromirror applications. IEEE J Sel Top Quantum Electron 10:462CrossRef
Sandner T, Jung D, Kallweit D, Grasshoff T, Schenk H (2011) Microscanner with vertical out of plane combdrive. In: Proceedings of the International Conference on Optical MEMS and Nanophotonics (OMN) 1: 33–34
Tortschanoff A, Lenzhofer M, Frank A, Wildenhain M, Sandner T, Schenk H, Scherf W, Kenda A (2010) Position encoding and phase control of resonant MOEMS mirrors. Sens Actuators A 162:235–240CrossRef
Yalcinkaya AD, Urey H, Brown D, Montague T, Sprague R (2006) Two-axis electromagnetic microscanner for high resolution displays. IEEE J Microelectromechanical Syst 15:786–794CrossRef
Zimmer F, Grueger H, Heberer A, Wolter A, Schenk H (2004) Development of a NIR micro spectrometer based on a MOEMS scanning grating. Proc SPIE 5455:9CrossRef
Metadata
Title
Compact optical position feedback scheme for MOEMS mirrors
Authors
Andreas Tortschanoff
M. Baumgart
D. Holzmann
M. Lenzhofer
T. Sandner
A. Kenda
Publication date
01-04-2014
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 4-5/2014
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-013-2026-2

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