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Microsystem Technologies
Published in: Microsystem Technologies 4-5/2014

01-04-2014 | Editorial

Special issue of the conference ‘Smart Sensors, Actuators and MEMS’, within the SPIE EUROPE Symposium ‘MICROTECHNOLOGIES’ Grenoble, France, 24–26 April 2013

Authors: Ulrich Schmid, Thomas Becker, Bernd Michel

Published in: Microsystem Technologies | Issue 4-5/2014

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Excerpt

The biannual Symposium was initiated in 2003 by José Fco. López from the University Las Palmas de Gran Canaria. Following events were in Seville, Spain 2005, again on the Canary Islands in 2007 and in 2009 for the first time outside Spain in Dresden, Germany, before it took place in 2011 in Prague, Czech Republic. In 2013 the SPIE EUROPE Symposium ‘MICROTECHNOLOGIES’ went to Grenoble, France. The focus of the Symposium chaired by Thomas Becker from EADS Innovation Works is to discuss the latest advances on a variety of technologies, addressed in five conferences Smart Sensors, Actuators and MEMS, VLSI Circuits and Systems, Nanotechnology, Bio-MEMS and Medical Microdevices, and Integrated Photonics: Materials, Devices and Applications, which are already shaping this millennium. …
next article High temperature stability of electrically conductive Pt–Rh/ZrO2 and Pt–Rh/HfO2 nanocomposite thin film electrodes

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Metadata
Title
Special issue of the conference ‘Smart Sensors, Actuators and MEMS’, within the SPIE EUROPE Symposium ‘MICROTECHNOLOGIES’ Grenoble, France, 24–26 April 2013
Authors
Ulrich Schmid
Thomas Becker
Bernd Michel
Publication date
01-04-2014
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 4-5/2014
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-014-2117-8

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