01-04-2014 | Technical Paper
Finite element modeling and experimental proof of NEMS-based silicon pillar resonators for nanoparticle mass sensing applications
Published in: Microsystem Technologies | Issue 4-5/2014
Log inActivate our intelligent search to find suitable subject content or patents.
Select sections of text to find matching patents with Artificial Intelligence. powered by
Select sections of text to find additional relevant content using AI-assisted search. powered by