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2019 | OriginalPaper | Chapter

2. Conductive AFM for Nanoscale Analysis of High-k Dielectric Metal Oxides

Authors : Christian Rodenbücher, Marcin Wojtyniak, Kristof Szot

Published in: Electrical Atomic Force Microscopy for Nanoelectronics

Publisher: Springer International Publishing

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Abstract

Conductive atomic force microscopy has become a valuable tool for investigation of electronic transport properties with utmost lateral resolution. In this chapter, we prevent an overview about C-AFM applications to high-k semiconductors, which are key materials for future energy-efficient information technology.

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Title: Conductive AFM for Nanoscale Analysis of High-k Dielectric Metal Oxides
Authors: Christian Rodenbücher
Marcin Wojtyniak
Kristof Szot
Publisher: Springer International Publishing
Book: Electrical Atomic Force Microscopy for Nanoelectronics
Print ISBN: 978-3-030-15611-4

Electronic ISBN: 978-3-030-15612-1

Copyright Year: 2019
DOI: https://doi.org/10.1007/978-3-030-15612-1_2