Skip to main content
Disciplines
Automotive Business IT + Informatics Construction + Real Estate Electrical Engineering + Electronics Energy + Sustainability Insurance + Risk Finance + Banking Management + Leadership Marketing + Sales Mechanical Engineering + Materials
Events
DE
EN
Books
Journals
Topic Page
Marketing
Start single access now
Access for companies
EXTENDED SEARCH
Log in
Top
Published in:
Cover of the book

2019 | OriginalPaper | Chapter

1. The Atomic Force Microscopy for Nanoelectronics

Author : Umberto Celano

Published in: Electrical Atomic Force Microscopy for Nanoelectronics

Publisher: Springer International Publishing

Log in

Activate our intelligent search to find suitable subject content or patents.

search-config
loading …

Abstract

The invention of scanning tunneling microscopy (STM), rapidly followed by atomic force microscopy (AFM), occurred at the time when extensive research on sub-µm metal oxide field-effect transistors (MOSFET) was beginning. Apparently uncorrelated, these events have positively influenced one another. In fact, ultra-scaled semiconductor devices required nanometer control of the surface quality, and the newborn microscopy techniques provided unprecedented sensing capability at the atomic scale. This alliance opened new horizons for materials characterization and continues to this day, with AFM representing one of the most popular analysis techniques in nanoelectronics. This book discusses how the introduction of new devices benefited from AFM, while driving the analysis and sensing capabilities in novel directions. Here, the goal is to introduce the major electrical AFM methods, going through the journey that has seen our life changed by the advent of ubiquitous nanoelectronics devices, and has extended our capability to sense matter on a scale previously inaccessible.

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

inform now

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

inform now
next chapter Conductive AFM for Nanoscale Analysis of High-k Dielectric Metal Oxides
Literature
1.
G. Binnig, C.F. Quate, C. Gerber, Atomic force microscope. Phys. Rev. Lett. 56, 930–933 (1986)ADSCrossRef
2.
Y. Martin, C.C. Williams, H.K. Wickramasinghe, Atomic force microscope–force mapping and profiling on a sub 100-Å scale. J. Appl. Phys. 61, 4723–4729 (1987)ADSCrossRef
3.
G.M. McClelland, R. Erlandsson, S. Chiang, Review of progress in quantitative non-destructive evaluation. Rev. Prog. Quant. Non-Destructive Eval. 6 B, 1307–1314 (1987)CrossRef
4.
G. Meyer, N.M. Amer, Novel optical approach to atomic force microscopy. Appl. Phys. Lett. 53, 1045–1047 (1988)ADSCrossRef
5.
F.J. Giessibl, Advances in atomic force microscopy. Rev. Mod. Phys. 75, 949–983 (2003)ADSCrossRef
6.
G. Binnig, R. Heinrich, W. Pauli, The scanning tunneling microscope. Sci. Am. 253, 50–56 (1985)CrossRef
7.
B. Voigtlaender, Scanning Probe Microscopy (Springer, Berlin, 2015)
8.
P. Eaton, P. West, Atomic Force Microscopy (Oxford University Press, Oxford, 2010)
9.
S.K. Kulkarni, Nanotechnology : Principles and Practices (Springer, Berlin, 2014)
10.
G. Haugstad, Atomic Force Microscopy: Understanding Basic Modes and Advanced Applications (Wiley, New York, 2012)
11.
12.
G. Binnig, H. Rohrer, In touch with atoms. Rev. Mod. Phys. 71, S324–S330 (1999)CrossRef
13.
O. Custance, R. Perez, S. Morita, Atomic force microscopy as a tool for atom manipulation. Nat. Nanotechnol. 4, 803–810 (2009)ADSCrossRef
14.
J.Y. Park, S. Maier, B. Hendriksen, M. Salmeron, Sensing current and forces with SPM. Mater. Today 13, 38–45 (2010)CrossRef
15.
S. Salahuddin, K. Ni, S. Datta, The era of hyper-scaling in electronics. Nat. Electron. 1, 442–450 (2018)CrossRef
16.
N.G. Orji et al., Metrology for the next generation of semiconductor devices. Nat. Electron. 1, 532–547 (2018)CrossRef
17.
18.
Y. Martin, D.W. Abraham, H.K. Wickramasinghe, High-resolution capacitance measurement and potentiometry by force microscopy. Appl. Phys. Lett. 52, 1103–1105 (1988)ADSCrossRef
19.
H.J. Mamin, D. Rugar, J.E. Stern, B.D. Terris, S.E. Lambert, Force microscopy of magnetization patterns in longitudinal recording media. Appl. Phys. Lett. 53, 1563–1565 (1988)ADSCrossRef
20.
S. Xu, M.F. Arnsdorf, Electrostatic force microscope for probing surface charges in aqueous solutions. Proc. Natl. Acad. Sci. 92, 10384–10388 (1995)ADSCrossRef
21.
M. Nonnenmacher, M. O’Boyle, H.K. Wickramasinghe, Surface investigations with a Kelvin probe force microscope. Ultramicroscopy 42–44, 268–273 (1992)CrossRef
22.
23.
W. Melitz, J. Shen, A.C. Kummel, S. Lee, Kelvin probe force microscopy and its application. Surf. Sci. Rep. 66, 1–27 (2011)ADSCrossRef
24.
X. Li et al., Quantitatively probing the magnetic behavior of individual nanoparticles by an AC field-modulated magnetic force microscopy. Sci. Rep. 6, 22467 (2016)ADSCrossRef
25.
W. Vandervorst, M. Meuris, Method for resistance measurements on a semiconductor element with controlled probe pressure, US5369372A (1994)
26.
J.R. Matey, J. Blanc, Scanning capacitance microscopy. J. Appl. Phys. 57, 1437–1444 (1985)ADSCrossRef
27.
A. Schulze, R. Cao, P. Eyben, T. Hantschel, W. Vandervorst, Outwitting the series resistance in scanning spreading resistance microscopy. Ultramicroscopy 161, 59–65 (2016)CrossRef
28.
P. Eyben, P. Bisiaux, A. Schulze, A. Nazir, W. Vandervorst, Fast Fourier transform scanning spreading resistance microscopy: a novel technique to overcome the limitations of classical conductive AFM techniques. Nanotechnology 26, 355702 (2015)CrossRef
29.
R. Shao, S.V. Kalinin, D.A. Bonnell, Local impedance imaging and spectroscopy of polycrystalline ZnO using contact atomic force microscopy. Appl. Phys. Lett. 82, 1869–1871 (2003)ADSCrossRef
30.
31.
32.
M.P. Murrell et al., Spatially resolved electrical measurements of SiO2 gate oxides using atomic force microscopy. Appl. Phys. Lett. 62, 786 (1993)ADSCrossRef
33.
P. Güthner, K. Dransfeld, Local poling of ferroelectric polymers by scanning force microscopy. Appl. Phys. Lett. 61, 1137–1139 (1992)ADSCrossRef
34.
C. Barth, C.R. Henry, Related content: Scanning force microscopy studies of domain structure in BaTiO3 single crystals (microscopy study) (1997)
35.
S. Jesse, S.V. Kalinin, Band excitation in scanning probe microscopy: sines of change. J. Phys. D Appl. Phys. 44, 464006 (2011)ADSCrossRef
36.
S. Gomès, A. Assy, P.-O. Chapuis, Scanning thermal microscopy: a review. Phys. Status Solidi 212, 477–494 (2015)ADSCrossRef
37.
Y. Yang, R. Huang, Probing memristive switching in nanoionic devices. Nat. Electron. 1, 274–287 (2018)CrossRef
38.
U. Celano et al., Imaging the three-dimensional conductive channel in filamentary-based oxide resistive switching memory. Nano Lett. 15, 7970–7975 (2015)ADSCrossRef
39.
R.B. Dinwiddie, R.J. Pylkki, P.E. West, Thermal conductivity contrast imaging with a scanning thermal microscope. Therm. Conduct. 22, 668–677 (1994)
40.
41.
S.A. Mari et al., Gating of the MlotiK1 potassium channel involves large rearrangements of the cyclic nucleotide-binding domains. Proc. Natl. Acad. Sci. 108, 20802–20807 (2011)ADSCrossRef
42.
S. Manzeli, D. Ovchinnikov, D. Pasquier, O.V. Yazyev, A. Kis, 2D transition metal dichalcogenides. Nat. Rev. Mater. 2, 17033 (2017)ADSCrossRef
43.
A.L. Weisenhorn, P. Maivald, H.-J. Butt, P.K. Hansma, Measuring adhesion, attraction, and repulsion between surfaces in liquids with an atomic-force microscope. Phys. Rev. B 45, 11226–11232 (1992)ADSCrossRef
44.
E. Betzig, A. Lewis, A. Harootunian, M. Isaacson, E. Kratschmer, Near field scanning optical microscopy (NSOM). Biophys. J. 49, 269–279 (1986)CrossRef
45.
U. Dürig, D.W. Pohl, F. Rohner, Near-field optical-scanning microscopy. J. Appl. Phys. 59, 3318–3327 (1986)ADSCrossRef
46.
N.F. van Hulst, F.B. Segerink, F. Achten, B. Bölger, Evanescent-field optical microscopy: effects of polarization, tip shape and radiative waves. Ultramicroscopy 42–44, 416–421 (1992)CrossRef
47.
R.C. Reddick, R.J. Warmack, D.W. Chilcott, S.L. Sharp, T.L. Ferrell, Photon scanning tunneling microscopy. Rev. Sci. Instrum. 61, 3669–3677 (1990)ADSCrossRef
48.
49.
S. Zhu, G.Q. Lo, D.L. Kwong, Performance of ultracompact copper-capped silicon hybrid plasmonic waveguide-ring resonators at telecom wavelengths. Opt. Express 20, 15232 (2012)ADSCrossRef
50.
L. Liu et al., Three-dimensional atomic force microscopy for sidewall imaging using torsional resonance mode. Scanning 2018, 1–8 (2018)
51.
T.-G. Kim et al., In-line critical dimension and sidewall roughness metrology study for compound nanostructure process control by in-line 3D atomic force microscope. ECS Trans. 75, 761–767 (2016)CrossRef
52.
Y. Liu et al., Tuning dirac states by strain in the topological insulator Bi2Se3. Nat. Phys. 10, 294–299 (2014)CrossRef
53.
P. Roushan et al., Topological surface states protected from backscattering by chiral spin texture. Nature 460, 1106–1109 (2009)ADSCrossRef
54.
55.
P. Maletinsky et al., A robust scanning diamond sensor for nanoscale imaging with single nitrogen-vacancy centres. Nat. Nanotechnol. 7, 320–324 (2012)ADSCrossRef
56.
F. Zenhausern, Y. Martin, H.K. Wickramasinghe, Scanning interferometric apertureless microscopy: optical imaging at 10 Angstrom resolution. Science (80) 269, 1083–1085 (1995)ADSCrossRef
57.
F. Zenhausern, M.P. O’Boyle, H.K. Wickramasinghe, Apertureless near-field optical microscope. Appl. Phys. Lett. 65, 1623–1625 (1994)ADSCrossRef
58.
F. Long, B. Cao, A. Khanal, S. Fang, R. Shahbazian-Yassar, Modification of a single-molecule AFM probe with highly defined surface functionality. Beilstein J. Nanotechnol. 5, 2122–2128 (2014)CrossRef
59.
T. Ando, High-speed atomic force microscopy. J. Electron. Microsc. (Tokyo) 62, 81–93 (2013)CrossRef
60.
G.R. Heath, S. Scheuring, High-speed AFM height spectroscopy reveals µs-dynamics of unlabeled biomolecules. Nat. Commun. 9, 4983 (2018)ADSCrossRef
61.
62.
X. Li et al., High-veracity functional imaging in scanning probe microscopy via Graph-Bootstrapping. Nat. Commun. 9, 2428 (2018)ADSCrossRef
63.
K.-H. Chung, Wear characteristics of atomic force microscopy tips: A reivew. Int. J. Precis. Eng. Manuf. 15, 2219–2230 (2014)CrossRef
64.
D. Sarid, R. Coratger, F. Ajustron, J. Beauvillain, Scanning force microscopy—with applications to electric, magnetic and atomic forces. Microsc. Microanal. Microstruct. 2, 649 (1991)CrossRef
65.
R. Garcia, A.W. Knoll, E. Riedo, Advanced scanning probe lithography. Nat. Nanotechnol. 9, 577–587 (2014)ADSCrossRef
66.
D. Sarid, Tapping-mode scanning force microscopy: metallic tips and samples. Comput. Mater. Sci. 5 (1996)CrossRef
67.
M. Stark, R.W. Stark, W.M. Heckl, R. Guckenberger, Inverting dynamic force microscopy: from signals to time-resolved interaction forces. Proc. Natl. Acad. Sci. 99, 8473–8478 (2002)ADSCrossRef
68.
T.J. Young et al., The use of the PeakForce™ quantitative nanomechanical mapping AFM-based method for high-resolution Young’s modulus measurement of polymers. Meas. Sci. Technol. 22, 125703 (2011)ADSCrossRef
69.
E. Meyer, H.J. Hug, R. Bennewitz, Scanning Probe Microscopy: The Lab on a Tip (Springer, Berlin, 2003)
70.
71.
J. Drelich, G.W. Tormoen, E.R. Beach, Determination of solid surface tension from particle-substrate pull-off forces measured with the atomic force microscope. J. Colloid Interface Sci. 280, 484–497 (2004)ADSCrossRef
72.
D.S. Grierson, E.E. Flater, R.W. Carpick, Accounting for the JKR–DMT transition in adhesion and friction measurements with atomic force microscopy. J. Adhes. Sci. Technol. 19, 291–311 (2005)CrossRef
73.
U. Celano et al., Evaluation of the electrical contact area in contact-mode scanning probe microscopy. J. Appl. Phys. 117, 214305 (2015)ADSCrossRef
74.
75.
T. Hantschel et al., Conductive diamond tips with sub-nanometer electrical resolution for characterization of nanoelectronics device structures. Phys. Status Solidi 206, 2077–2081 (2009)ADSCrossRef
76.
77.
M. Enachescu, D. Schleef, D. Ogletree, M. Salmeron, Integration of point-contact microscopy and atomic-force microscopy: application to characterization of graphite/Pt(111). Phys. Rev. B 60, 16913–16919 (1999)ADSCrossRef
78.
P. Eyben, T. Janssens, W. Vandervorst, Scanning spreading resistance microscopy (SSRM) 2d carrier profiling for ultra-shallow junction characterization in deep-submicron technologies. Mater. Sci. Eng., B 124–125, 45–53 (2005)CrossRef
79.
K. Mylvaganam, L.C. Zhang, P. Eyben, J. Mody, W. Vandervorst, Evolution of metastable phases in silicon during nanoindentation: mechanism analysis and experimental verification. Nanotechnology 20, 305705 (2009)CrossRef
80.
81.
A. Gruverman, S.V. Kalinin, Piezoresponse force microscopy and recent advances in nanoscale studies of ferroelectrics. Front. Ferroelectr. A Spec. Issue J. Mater. Sci. 1, 107–116 (2007)CrossRef
82.
A. Kholkin, S. Kalinin, A. Roelofs, A. Gruverman, Review of ferroelectric domain imaging by piezoresponse force microscopy. Scanning Probe Microsc. Electr. Electromech. Phenom. Nanoscale 1, 173–214 (2007)
83.
S. Jesse, S.V. Kalinin, R. Proksch, A.P. Baddorf, B.J. Rodriguez, The band excitation method in scanning probe microscopy for rapid mapping of energy dissipation on the nanoscale. Nanotechnology 18 (2007)ADSCrossRef
84.
S. Morita, F.J. Giessibl, E. Meyer, R. Wiesendanger, Noncontact Atomic Force Microscopy (2015)
85.
P.E. Hillner, S. Manne, A.J. Gratz, P.K. Hansma, AFM images of dissolution and growth on a calcite crystal. Ultramicroscopy 42–44, 1387–1393 (1992)CrossRef
86.
L. Angeloni, D. Passeri, M. Reggente, D. Mantovani, M. Rossi, Removal of electrostatic artifacts in magnetic force microscopy by controlled magnetization of the tip: Application to superparamagnetic nanoparticles. Sci. Rep. 6, 1–14 (2016)CrossRef
87.
S. Gómez-Moñivas, L.S. Froufe-Pérez, A.J. Caamaño, J.J. Sáenz, Electrostatic forces between sharp tips and metallic and dielectric samples. Appl. Phys. Lett. 79, 4048 (2001)ADSCrossRef
88.
L. Fumagalli, D. Esteban-Ferrer, A. Cuervo, J.L. Carrascosa, G. Gomila, Label-free identification of single dielectric nanoparticles and viruses with ultraweak polarization forces. Nat. Mater. 11, 808–816 (2012)ADSCrossRef
89.
A.K. Henning et al., Two-dimensional surface dopant profiling in silicon using scanning Kelvin probe microscopy. J. Appl. Phys. 77, 1888–1896 (1995)ADSCrossRef
90.
C. Maragliano, D. Heskes, M. Stefancich, M. Chiesa, T. Souier, Dynamic electrostatic force microscopy technique for the study of electrical properties with improved spatial resolution. Nanotechnology 24, 225703 (2013)ADSCrossRef
91.
D.A. Bonnell, J. Garra, Scanning probe microscopy of oxide surfaces: atomic structure and properties. Reports Prog. Phys. 71, 044501 (2008)ADSCrossRef
92.
A.J. Weymouth, T. Wutscher, J. Welker, T. Hofmann, F.J. Giessibl, Phantom force induced by tunneling current: a characterization on Si(111). Phys. Rev. Lett. 106, 226801 (2011)ADSCrossRef
93.
G.E. Moore, Cramming more components onto integrated circuits. Reprinted from Electronics 38(8), 114 ff. (1965, Apr 19). IEEE Solid-State Circuits Soc. Newsl. 11, 33–35 (2006)
94.
S. Woo et al., Observation of room-temperature magnetic skyrmions and their current-driven dynamics in ultrathin metallic ferromagnets. Nat. Mater. 15, 501–506 (2016)ADSCrossRef
95.
N. Nagaosa, Y. Tokura, Topological properties and dynamics of magnetic skyrmions. Nat. Nanotechnol. 8, 899–911 (2013)ADSCrossRef
96.
A. Hrabec et al., Current-induced skyrmion generation and dynamics in symmetric bilayers. Nat. Commun. 8, 1–6 (2017)CrossRef
97.
98.
C. Musumeci, Advanced scanning probe microscopy of graphene and other 2D materials. Crystals 7, 216 (2017)CrossRef
99.
G.X. Ni et al., Fundamental limits to graphene plasmonics. Nature 557, 530–533 (2018)ADSCrossRef
100.
G. Scappucci et al., A complete fabrication route for atomic-scale, donor-based devices in single-crystal germanium. Nano Lett. 11, 2272–2279 (2011)ADSCrossRef
101.
L. Oberbeck et al., Imaging of buried phosphorus nanostructures in silicon using scanning tunneling microscopy. Appl. Phys. Lett. 104, 1–6 (2014)CrossRef
102.
R. Vrijen et al., Electron-spin-resonance transistors for quantum computing in silicon-germanium heterostructures. Phys. Rev. A 62, 012306 (2000)ADSCrossRef
103.
E. Bussmann et al., Scanning capacitance microscopy registration of buried atomic-precision donor devices. Nanotechnology 26, 085701 (2015)ADSCrossRef
104.
A. Dazzi, R. Prazeres, F. Glotin, J.M. Ortega, Local infrared microspectroscopy with subwavelength spatial resolution with an atomic force microscope tip used as a photothermal sensor. Opt. Lett. 30, 2388 (2005)ADSCrossRef
105.
C. Chen, N. Hayazawa, S. Kawata, A 1.7 nm resolution chemical analysis of carbon nanotubes by tip-enhanced Raman imaging in the ambient. Nat. Commun. 5, 1–5 (2014)
106.
A.J. Huber, F. Keilmann, J. Wittborn, J. Aizpurua, R. Hillenbrand, Terahertz near-field nanoscopy of nanodevices. Nano Lett. 8, 3766–3770 (2008)ADSCrossRef
107.
N. Rotenberg, L. Kuipers, Mapping nanoscale light fields. Nat. Photonics 8, 919–926 (2014)ADSCrossRef
108.
A. Soudi, R.D. Dawson, Y. Gu, Quantitative heat dissipation characteristics in current-carrying GaN nanowires probed by combining scanning thermal microscopy and spatially resolved Raman spectroscopy. ACS Nano 5, 255–262 (2011)CrossRef
109.
E. Yalon et al., Spatially resolved thermometry of resistive memory devices. Sci. Rep. 7, 15360 (2017)ADSCrossRef
110.
T. Ando, High-speed atomic force microscopy and its future prospects. Biophys. Rev. 10, 285–292 (2018)CrossRef
111.
F. Mohn, L. Gross, N. Moll, G. Meyer, Imaging the charge distribution within a single molecule. Nat. Nanotechnol. 7, 227–231 (2012)ADSCrossRef
112.
A. Ulčinas, Vaitekonis, Rotational scanning atomic force microscopy. Nanotechnology 28 (2017)CrossRef
113.
R. Garcia, E.T. Herruzo, The emergence of multifrequency force microscopy. Nat. Nanotechnol. 7, 217–226 (2012)ADSCrossRef
114.
U. Celano et al., Mesoscopic physical removal of material using sliding nano-diamond contacts. Sci. Rep. 8, 2994 (2018)ADSCrossRef
Metadata
Title
The Atomic Force Microscopy for Nanoelectronics
Author
Umberto Celano
Copyright Year
2019
Book
Electrical Atomic Force Microscopy for Nanoelectronics

Print ISBN: 978-3-030-15611-4

Electronic ISBN: 978-3-030-15612-1

Copyright Year: 2019

DOI
https://doi.org/10.1007/978-3-030-15612-1_1