Advertisement
Published in:
2006 | OriginalPaper | Chapter
Continuum Microstructures Loaded Electrostatically
Authors : Francesco De Bona, Mircea Gh. Munteanu
Published in: Microsystems Mechanical Design
Publisher: Springer Vienna
Activate our intelligent search to find suitable subject content or patents.
Select sections of text to find matching patents with Artificial Intelligence. powered by
Select sections of text to find additional relevant content using AI-assisted search. powered by
Electrostatic actuated flexible structure are frequently encountered in microsystems. The behaviour of these devices is characterized by electromechanical coupling, due to the mutual interaction between the electrostatic field and the deflection of the structure. A common case, frequently analyzed in the literature, is that of cantilever beam loaded electrostatically; in this case different analytical approaches based on a strong simplification of the elctromechanical model are available. If a more accurate analysis has to be performed, methods based on numerical techniques have to be preferred. In this case possible approaches are: lumped models, methods based on a Newton’s non-linear solution scheme, sequential field coupling algorithms.