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Open Access 01-11-2009

Controlled Growth of Non-Uniform Arsenic Profiles in Silicon Reduced-Pressure Chemical Vapor Deposition Epitaxial Layers

Authors: M. Popadić, T. L. M. Scholtes, W. de Boer, F. Sarubbi, L. K. Nanver

Title: Controlled Growth of Non-Uniform Arsenic Profiles in Silicon Reduced-Pressure Chemical Vapor Deposition Epitaxial Layers
Authors: M. Popadić
T. L. M. Scholtes
W. de Boer
F. Sarubbi
L. K. Nanver
Publication date: 01-11-2009
Publisher: Springer US
Published in: Journal of Electronic Materials / Issue 11/2009
Print ISSN: 0361-5235
Electronic ISSN: 1543-186X
DOI: https://doi.org/10.1007/s11664-009-0897-x