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Published in:
1984 | OriginalPaper | Chapter
Depth Profiling of Evaporated Se-Te Films with SIMS
Authors : F. Soeda, K. Okuno, A. Ishitani, M. Nagano, T. Iijima
Published in: Secondary Ion Mass Spectrometry SIMS IV
Publisher: Springer Berlin Heidelberg
Included in: Professional Book Archive
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The Se-based photoconductor is widely used in photoconductive printing. Depth profiling of elements of major components and also low concentration dopants and impurities is desirable to understand the photoconductive behavior of the materials. However, until recently, use of SIMS on chalcogen photocon-ductors has been minimal because of the charging problem encountered in the measurement.