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Microsystem Technologies

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02-12-2019 | Technical Paper

Design and development of a MEMS butterfly resonator using synchronizing beam and out of plane actuation

Authors: Nabeel Khan, Mohammed Jalal Ahamed

Published in: Microsystem Technologies | Issue 5/2020

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Abstract

This paper presents beam modeling techniques for maximizing mechanical sensitivity of a butterfly resonator for gyroscopic applications. We investigate the geometric aspects of synchronizing beam that connects the wings of a butterfly resonator. Our results show that geometric variation in the synchronizing beam can have a large effect on the frequency split and sensitivity of the device. The model simulation shows a sensitivity of \( 10^{ - 12} \)\( (m/^\circ /s) \) for a frequency split of 10 Hz resulting from the optimized synchronized beam. Out of plane actuation was developed to drive and sense the resonators displacement. Fabricated butterfly resonators were tested, and the experimental results show a frequency split of 305 Hz and 400 Hz while the model illustrated a split of 195 Hz and 330 Hz respectively. The design and analysis presented in this paper can further aid the development of MEMS butterfly resonators for inertial sensing applications.

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Title: Design and development of a MEMS butterfly resonator using synchronizing beam and out of plane actuation
Authors: Nabeel Khan
Mohammed Jalal Ahamed
Publication date: 02-12-2019
Publisher: Springer Berlin Heidelberg
Published in: Microsystem Technologies / Issue 5/2020
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-019-04705-8

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