Vibration sensitivity analysis of the ‘Butterfly-gyro’ structure

The ‘Butterfly-gyro’ is simple to manufacture with single sided electrostatic excitation and capacitive detection, and it is considered as one kind of the microgyroscope with high sensitivity due to its unique structure. This paper provides the sensitivity analytical model by solving the dynamic equations of motion and the design guidelines for microgyroscope with high sensitivity. Using Coriolis Effect and Newton’s second law, the dynamic equations are built. The sensitivity analytical model, including the denotations of Q factors and the resonant frequencies, is built. The approximate analytical expressions of Q factors and the resonant frequencies are derived by rational assumptions. Based on the sensitivity analytical model, the parametric analysis is carried out, and the design guidelines of high sensitivity are also deduced. Finally, Q factor, frequency split and other factors influencing the sensitivity are discussed in details to enhance its sensitivity. Results presented are valuable in the design and parameters optimization of the microgyroscope with high sensitivity.