Design and experimental research on piezoelectric pump with triple vibrators

A new kind of piezoelectric pump with triple vibrators was presented. The pump adopted circular piezoelectric vibrator with a hole in the middle, and a check valve was adhered to the hole to cut off air. The working principle of the pump was analyzed. A prototype of piezoelectric pump was fabricated and measured. The experimental results show: (1) The maximum flow rate of the piezoelectric pump under the working mode of vibrators 1, and 3 driven synchronously and vibrator 2 driven asynchronously reached to 1513.2 mL/min when driving frequency was 220 Hz, and the maximum pressure reached to 4.08 kPa when that was 140 Hz. (2) The output performance of the piezoelectric pump with triple vibrators was the best under the working mode of vibrators 1, and 3 driven synchronously and vibrator 2 driven asynchronously. (3) When only two vibrators participate in working, the best connection method was vibrator 1 not driven and vibrators 2, and 3 driven asynchronously. (4) When only one vibrator participates in working, the best connection method was vibrator 3 driven solely.