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Artificial Life and Robotics
Published in: Artificial Life and Robotics 4/2015

01-12-2015 | Original Article

Development of impact-type rotary actuator and application for MEMS microrobot by bare chip IC of hardware neuron model

Authors: Minami Takato, Yuka Naito, Kazuaki Maezumi, Yuki Ishihara, Yuki Okane, Hirozumi Oku, Masaki Tatani, Ken Saito, Fumio Uchikoba

Published in: Artificial Life and Robotics | Issue 4/2015

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Abstract

This paper proposes an impact-type microelectro mechanical systems (MEMS) rotary actuator and application for a millimeter-scale MEMS microrobot. The rotational motion of the actuator was generated by vibration of a multilayer piezoelectric element. The size of the fabricated actuator was 1.0 mm × 4.4 mm × 3.2 mm. The fabricated actuator was controlled by the pulse-type hardware neuron model (P-HNM) as the biomimetics technology, and it was integrated in a CMOS IC. The maximum rotational speed was 37.5 rpm when an applied neuron frequency was 39.6 kHz and an input voltage was 3.48 V. The actuator showed the low power consumption of 96.4 mW. The fabricated actuator and the fabricated control circuit that included the P-HNM were built in the MEMS microrobot. The size of the fabricated microrobot was 4.0 mm × 4.6 mm × 4.8 mm.
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Metadata
Title
Development of impact-type rotary actuator and application for MEMS microrobot by bare chip IC of hardware neuron model
Authors
Minami Takato
Yuka Naito
Kazuaki Maezumi
Yuki Ishihara
Yuki Okane
Hirozumi Oku
Masaki Tatani
Ken Saito
Fumio Uchikoba
Publication date
01-12-2015
Publisher
Springer Japan
Published in
Artificial Life and Robotics / Issue 4/2015
Print ISSN: 1433-5298
Electronic ISSN: 1614-7456
DOI
https://doi.org/10.1007/s10015-015-0239-4

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