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2018 | OriginalPaper | Chapter

2. DSAL Manufacturability

Authors : Seongbo Shim, Youngsoo Shin

Published in: Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

Publisher: Springer International Publishing

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Abstract

In DSAL, contacts (or vias) are patterned in two steps. A GP that surrounds a group of nearby contacts forms on a wafer through optical lithography; member contacts then form through DSA process that arises within a GP. Final contact shape can be predicted by two sequential simulations: lithography simulation to predict GP shape and DSA simulation to predict contact. In reality, the two simulations should be repeated to account for lithography as well as DSA variations.

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next chapter Placement Optimization for DSAL
Literature
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Metadata
Title
DSAL Manufacturability
Authors
Seongbo Shim
Youngsoo Shin
Copyright Year
2018
Book
Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

Print ISBN: 978-3-319-76293-7

Electronic ISBN: 978-3-319-76294-4

Copyright Year: 2018

DOI
https://doi.org/10.1007/978-3-319-76294-4_2

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