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Published in:
01-07-2013
Effective improvement in the distribution of single crystalline diamond nanorods fabricated from the randomly-oriented polycrystalline films
Published in: Journal of Materials Science: Materials in Electronics | Issue 7/2013
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Abstract
By using the bias-assisted reactive ion etching technique and the etching masks of Au nanodots, the high-density single crystalline diamond nanorods have been obtained from the polycrystalline diamond films with randomly-oriented grains grown on silicon substrates. The inhomogenous distribution of the nanorods mainly results from the existence of grain boundaries in the films, and can be effectively improved by adding the graphite sheet under the substrate. Furthermore, the fabrication mechanism of the nanorod array is carefully investigated in this paper. The morphological evolution is observed by using a scanning electron microscopy technique. Raman measurements are carried out to monitor the phase change during the etching process. It is found that the non-diamond phases are present during the experimental process, and then are completely removed away in the end.