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Journal of Electroceramics
Published in: Journal of Electroceramics 2-4/2006

01-12-2006 | 3. Nanomaterials and synthesis

Effects of the O2/Ar gas flow ratio on the electrical and transmittance properties of ZnO:Al films deposited by RF magnetron sputtering

Authors: Keunbin Yim, Hyounwoo Kim, Chongmu Lee

Published in: Journal of Electroceramics | Issue 2-4/2006

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Metadata
Title
Effects of the O2/Ar gas flow ratio on the electrical and transmittance properties of ZnO:Al films deposited by RF magnetron sputtering
Authors
Keunbin Yim
Hyounwoo Kim
Chongmu Lee
Publication date
01-12-2006
Publisher
Kluwer Academic Publishers
Published in
Journal of Electroceramics / Issue 2-4/2006
Print ISSN: 1385-3449
Electronic ISSN: 1573-8663
DOI
https://doi.org/10.1007/s10832-006-7036-3

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