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2018 | OriginalPaper | Chapter

Electrodes for Nerve Recording and Stimulation

Authors : Jing-Quan Liu, Hong-Chang Tian, Xiao-Yang Kang, Ming-Hao Wang

Published in: Micro Electro Mechanical Systems

Publisher: Springer Singapore

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Abstract

With the rapid development of MEMS fabrication technologies, versatile microelectrodes with different structures and functions have been designed and fabricated. The flexible MEMS microelectrodes exhibit multiaspect excellent characteristics compared to stiff microelectrodes based on silicon or SU-8, which comprising: lighter weight, smaller volume, better conforming to neural tissue, and lower fabrication cost.

This chapter mainly reviewed key technologies on flexible MEMS microelectrodes for neural interface in recent years, including: design and fabrication technology, fluidic channels, μLEDs, and electrode-tissue interface modification technology for performance improvement. Furthermore, the future directions of flexible MEMS microelectrodes were described including transparent and stretchable microelectrodes with characteristics of multifunction, high-density, biodegradation, and next-generation electrode-tissue interface modifications facilitated electrode efficacy and implantation safety.

The goal of this chapter is to provide the reader a broader overview of flexible MEMS technologies that can be applied together to solve problems in neural interface.

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Abidian MR, Martin DC (2009) Multifunctional Nanobiomaterials for neural interfaces. Adv Funct Mater 19(4):573–585CrossRef

Abidian MR, Ludwig KA, Marzullo TC, Martin DC, Kipke DR (2009) Interfacing conducting polymer nanotubes with the central nervous system: chronic neural recording using poly (3, 4-ethylenedioxythiophene) nanotubes. Adv Mater 21(37):3764–3770CrossRef

Abidian MR, Daneshvar ED, Egeland BM, Kipke DR, Cederna PS, Urbanchek MG (2012) Hybrid conducting polymer-hydrogel conduits for axonal growth and neural tissue engineering. Adv Healthcare Mater 1(6):762–767CrossRef

Al-bahrani MR, Ahmad W, Mehnane HF, Chen Y, Cheng Z, Gao Y (2015) Enhanced electrocatalytic activity by RGO/MWCNTs/NiO counter electrode for dye-sensitized solar cells. Nano-Micro Lett 7(3):298–306CrossRef

Altuna EB, Cid E, Aivar P, Gal B, Berganzo J, Gabriel G, Guimera A, Villa R, Fernandez LJ, Menendez de la Prida L (2013) SU-8 based microprobes for simultaneous neural depth recording and drug delivery in the brain. Lab Chip 13(7):1422–1430CrossRef

Anthony TE, Dee N, Bernard A, Lerchner W, Heintz N, Anderson DJ (2014) Control of stress-induced persistent anxiety by an extra-amygdala septohypothalamic circuit. Cell 156(3):522–536CrossRef

Aregueta-Robles UA, Woolley AJ, Poole-Warren LA, Lovell NH, Green RA (2014) Organic electrode coatings for next-generation neural interfaces. Front Neuroeng 7:15CrossRef

Arter JA, Taggart DK, McIntire TM, Penner RM, Weiss GA (2010) Virus-PEDOT nanowires for biosensing. Nano Lett 10(12):4858–4862CrossRef

Asplund M, von Holst H, Inganas O (2008) Composite biomolecule/PEDOT materials for neural electrodes. Biointerphases 3(3):83–93CrossRef

Asplund M, Nyberg T, Inganäs O (2010) Electroactive polymers for neural interfaces. Polym Chem 1(9):1374–1391CrossRef

Au KM, Lu Z, Matcher SJ, Armes SP (2013) Anti-biofouling conducting polymer nanoparticles as a label-free optical contrast agent for high resolution subsurface biomedical imaging. Biomaterials 34(35):8925–8940CrossRef

Bangar MA, Shirale DJ, Chen W, Myung NV, Mulchandani A (2009) Single conducting polymer nanowire chemiresistive label-free immunosensor for cancer biomarker. Anal Chem 81(6):2168–2175CrossRef

Bongo M, Winther-Jensen O, Himmelberger S, Strakosas X, Ramuz M, Hama A, Stavrinidou E, Malliaras GG, Salleo A, Winther-Jensen B (2013) PEDOT:gelatin composites mediate brain endothelial cell adhesion. J Mater Chem B 1:3860–3867CrossRef

Cho Y, Borgens RB (2013) Electrically controlled release of the nerve growth factor from a collagen–carbon nanotube composite for supporting neuronal growth. J Mater Chem B 1(33):4166–4170CrossRef

Cogan SF (2008) Neural stimulation and recording electrodes. Annu Rev Biomed Eng 10:275–309CrossRef

Cogan SF, Guzelian AA, Agnew WF, Yuen TG, Mccreery DB (2004) Over-pulsing degrades activated iridium oxide films used for intracortical neural stimulation. J Neurosci Meth 137(2):141CrossRef

Cui XY, Martin DC (2003) Electrochemical deposition and characterization of poly(3,4-ethylenedioxythiophene) on neural microelectrode arrays. Sensor Actuat B-Chem 89(1–2):92–102CrossRef

Dobson J (2008) Remote control of cellular behaviour with magnetic nanoparticles. Nat Nanotechnol 3(3):139–143CrossRef

Farina D, Yoshida K, Stieglitz T, Koch KP (2008) Multichannel thin-film electrode for intramuscular electromyographic recordings. J Appl Physiol 104(3):821–827CrossRef

Ferguson JE, Boldt C, Redish AD (2009) Creating low-impedance tetrodes by electroplating with additives. Sensor Actuat A-Phys 156(2):388–393CrossRef

Gao KP, Li G, Liao LY, Cheng J, Zhao JL, Xu YS (2013) Fabrication of flexible microelectrode arrays integrated with microfluidic channels for stable neural interfaces. Sensor Actuat A-Phys 197:9–14CrossRef

Gomez N, Lee JY, Nickels JD, Schmidt CE (2007) Micropatterned polypyrrole: a combination of electrical and topographical characteristics for the stimulation of cells. Adv Funct Mater 17(10):1645–1653CrossRef

Grill WM, Norman SE, Bellamkonda RV (2009) Implanted neural interfaces: biochallenges and engineered solutions. Annu Rev Biomed Eng 11:1–24CrossRef

Hira R, Honkura NJ, Maruyama Y, Augustine G, Kasai H, Matsuzaki M (2009) Transcranial optogenetic stimulation for functional mapping of the motor cortex. J Neurosci Meth 179(2):258–263CrossRef

Hochberg LR, Serruya MD, Friehs GM, Mukand JA, Saleh M, Caplan AH, Branner A, Chen D, Penn RD, Donoghue JP (2006) Neuronal ensemble control of prosthetic devices by a human with tetraplegia. Nature 442(7099):164–171CrossRef

Hong X, Wu Z, Chen L, Wu F, Wei L, Yuan W (2014) Hydrogel microneedle arrays for transdermal drug delivery. Nano-Micro Lett 6(3):191–199CrossRef

Hsiao YS, Kuo CW, Chen P (2013) Multifunctional Graphene–PEDOT microelectrodes for on-Chip manipulation of human Mesenchymal stem cells. Adv Funct Mater 23(37):4649–4656CrossRef

Huang YJ, Wu HC, Tai NH, Wang TW (2012) Carbon Nanotube rope with electrical stimulation promotes the differentiation and maturity of neural stem cells. Small 8(18):2869–2877CrossRef

Iwai Y, Honda S, Ozeki H, Hashimoto M, Hirase H (2011) A simple head-mountable led device for chronic stimulation of optogenetic molecules in freely moving mice. Neurosci Res 70(1):124–127CrossRef

Jarc M, Berniker M, Tresch MC (2013) FES control of isometric forces in the rat Hindlimb using many muscles. IEEE Trans Bio-Med Eng 60(5):1422–1430CrossRef

Jeong JW, Mccall JG, Shin G, Zhang Y, Alhasani R, Kim M (2015) Wireless optofluidic systems for programmable in vivo pharmacology and optogenetics. Cell 162(3):662–674CrossRef

Jessin J, Yuefa L, Jinsheng Z, Jeffrey AL, Yong X (2011) Microfabrication of 3D neural probes with combined electrical and chemical interfaces. J Micromech Microeng 21(10):105011CrossRef

Ji BW, Kang XY, Wang MH, Bao BF, Tian HC, Yang B, Chen X, Wang XL, Liu JQ (2017) Photoelectric neural interface combining wire-bondingμLEDS with iridium oxide microelectrodes for optogenetics, MEMS 2017, Las Vegas, 22–26 Jan

Kang XY, Liu JQ, Tian HC, Zhang C, Yang B, NuLi Y, Zhu HY, Yang CS (2014a) Controlled activation of iridium film for AIROF microelectrodes. Sensor Actuat B-Chem 190:601–611CrossRef

Kang XY, Liu JQ, Tian HC, Yang B, Nuli YN, Yang CS (2014b) Fabrication and electrochemical comparison of SIROF-AIROF-EIROF microelectrodes for neural interfaces. IEEE Eng Med Biol:478–481

Kang XY, Liu JQ, Tian HC, Yang B, NuLi YN, Yang CS (2014c) Optimization and electrochemical characterization of RF-sputtered iridium oxide microelectrodes for electrical stimulation. J Microelectromech Syst 24(2)CrossRef

Kang XY, Liu JQ, Tian HC, Du JC, Yang B, Zhu HY, NuLi YN Yang CS (2014d) Fabrication and degradation characteristic of sputtered iridium oxide neural microelectrodes for Fes application, MEMS 2014, San Francisco, 26–30 Jan, 616–619

Kang XY, Liu JQ, Tian HC, Yang B, Nuli YN, Yang CS (2015) Self-closed Parylene cuff electrode for peripheral nerve recording. J Microelectromech Syst 24(2):319–332CrossRef

Kim S, Bhandari R, Klein M, Negi S, Rieth L, Tathireddy P, Toepper M, Oppermann H, Solzbacher F (2009) Integrated wireless neural interface based on the Utah electrode array. Biomed Microdevices 11(2):453–466CrossRef

Kim H, Viventi J, Amsden JJ, Xiao JL, Vigeland L, Kim YS, Blanco JA, Panilaitis B, Frechette ES, Contreras D, Kaplan DL, Omenetto FG, Huang YG, Hwang KC, Zakin MR, Litt B, Rogers JA (2010) Dissolvable films of silk fibroin for ultrathin conformal bio-integrated electronics. Nat Mater 9(6):511–517CrossRef

Kozai TDY, Langhals NB, Patel PR, Deng XP, Zhang HN, Smith KL, Lahann J, Kotov NA, Kipke DR (2012) Ultrasmall implantable composite microelectrodes with bioactive surfaces for chronic neural interfaces. Nat Mater 11(12):1065–1073CrossRef

Kwon KY, Lee HM, Ghovanloo M, Weber A, Li W (2014) A wireless slanted optrode array with intergrated micro LEDs for optogenetics, MEMS 2014, San Francisco, 26–30 Jan

Lee JY, Bashur CA, Goldstein AS, Schmidt CE (2009) Polypyrrole-coated electrospun PLGA nanofibers for neural tissue applications. Biomaterials 30(26):4325–4335CrossRef

Luo X, Weaver CL, Zhou DD, Greenberg R, Cui XT (2011) Highly stable carbon nanotube doped poly (3, 4-ethylenedioxythiophene) for chronic neural stimulation. Biomaterials 32(24):5551–5557CrossRef

Martins PM, Ribeiro S, Ribeiro C, Sencadas V, Gomes AC, Gama FM, Lanceros-Mendez S (2013) Effect of poling state and morphology of piezoelectric poly(vinylidene fluoride) membranes for skeletal muscle tissue engineering. RSC Adv 3(39):17938–17944CrossRef

Memberg WD, Stage TG, Kirsch RF (2014) A fully implanted intramuscular bipolar Myoelectric signal recording electrode. Neuromodulation 17(8):794–799CrossRef

Metz S, Bertsch A, Bertrand D, Renaud P (2004) Flexible polyimide probes with microelectrodes and embedded microfluidic channels for simultaneous drug delivery and multi-channel monitoring of bioelectric activity. Biosens Bioelectron 19(10):1309–1318CrossRef

Midrio M (2006) The denervated muscle: facts and hypotheses. A historical review. Eur J Appl Physiol 98(1):1–21CrossRef

Mitch WE, Goldberg AL (1996) Mechanisms of disease: mechanisms of muscle wasting: the role of the ubiquitin-proteasome pathway. New Engl J Med 335(25):1897–1905CrossRef

Navarro X, Krueger TB, Lago N, Micera S, Stieglitz T, Dario P (2005) A critical review of interfaces with the peripheral nervous system for the control of neuroprostheses and hybrid bionic systems. J Peripher Nerv Syst 10(3):229CrossRef

Ortiz-Catalan M, Branemark R, Hakansson B, Delbeke J (2012) On the viability of implantable electrodes for the natural control of artificial limbs: review and discussion. Biomed Eng Online 11(1):33CrossRef

Park SY, Park J, Sim SH, Sung MG, Kim KS, Hong BH, Hong S (2011) Enhanced differentiation of human neural stem cells into neurons on Graphene. Adv Mater 23(36),H263–H267CrossRef

Plesse C, Vidal F, Teyssié D, Chevrot C (2010) Conducting polymer artificial muscle fibres: toward an open air linear actuation. Chem Commun 46(17):2910–2912CrossRef

Pongrácz ZF, Márton G, Bérces Z, Ulbert I, Fürjes P (2013) Deep-brain silicon multielectrodes for simultaneous in vivo neural recording and drug delivery. Sensor Actuat B-Chem 189:97–105CrossRef

Poole-Warren L, Lovell N, Baek S, Green R (2010) Development of bioactive conducting polymers for neural interfaces. Expert Rev Med Devices 7(1):35–49CrossRef

Quigley F, Razal JM, Kita M, Jalili R, Gelmi A, Penington A, Ovalle-Robles R, Baughman RH, Clark GM, Wallace GG (2012) Electrical stimulation of myoblast proliferation and differentiation on aligned nanostructured conductive polymer platforms. Adv Healthc Mater 1(6):801–808CrossRef

Radisic M, Park H, Shing H, Consi T, Schoen FJ, Langer R, Freed LE, Vunjak-Novakovic G (2004) From the cover:functional assembly of engineered myocardium by electrical stimulation of cardiac myocytes cultured on scaffolds. Proc Natl Acad Sci U S A 52:18129–18134CrossRef

Receveur RAM, Lindemans FW, de Rooij NF (2007) Microsystem technologies for implantable applications. J Micromech Microeng 17(5):R50–R80CrossRef

Robblee LS, Mchardy J, Agnew WF, Bullara LA (1983) Electrical stimulation with pt electrodes. Vii. Dissolution of pt electrodes during electrical stimulation of the cat cerebral cortex. J Neurosci Meth 9(4):301–308CrossRef

Rui YF, Liu JQ, Wang YJ, Yang CS (2011) Parylene-based implantable pt-black coated flexible 3-D hemispherical microelectrode arrays for improved neural interfaces. Microsyst Technol 17(3):437–442CrossRef

Rui YF, Liu JQ, Yang B, Li KY, Yang CS (2012) Parylene-based implantable platinum-black coated wire microelectrode for orbicularis oculi muscle electrical stimulation. Biomed Microdevices 14(2):367–373CrossRef

Simon T, Kurup S, Larsson KC, Hori R, Tybrandt K, Goiny M, Jager EW, Berggren M, Canlon B, Richter-Dahlfors A (2009) Organic electronics for precise delivery of neurotransmitters to modulate mammalian sensory function. Nat Mater 8(9):742–746CrossRef

Svennersten K, Berggren M, Richter-Dahlfors A, Jager EWH (2011) Mechanical stimulation of epithelial cells using polypyrrole microactuators. Lab Chip 11(19):3287–3293CrossRef

Takeuchi S, Ziegler D, Yoshida Y, Mabuchi K, Suzuki T (2005) Parylene flexible neural probes integrated with microfluidic channels. Lab Chip 5(5):519–523CrossRef

Tandon N, Cannizzaro C, Chao PHG, Maidhof R, Marsano A, Au HTH, Radisic M, Vunjak-Novakovic G (2009) Electrical stimulation systems for cardiac tissue engineering. Nat Protoc 4(2):155–173CrossRef

Thomas CK, Zaidner EY, Calancie B, Broton JG, Bigland-Ritchie BR (1997) Muscle weakness, paralysis, and atrophy after human cervical spinal cord injury. Exp Neurol 148(2):414–423CrossRef

Tian HC, Liu JQ, Du JC, Kang XY, Zhang C, Yang B, Chen X, Yang CS (2014a) Flexible intramuscular micro tube electrode combining electrical and chemical Interface. IEEE Eng Med Biol:6949–6952

Tian HC, Liu JQ, Wei DX, Kang XY, Zhang C, Du JC, Yang B, Chen X, Zhu HY, NuLi YN, Yang CS (2014b) Graphene oxide doped conducting polymer nanocomposite film for electrode-tissue interface. Biomaterials 35(7):2120–2129CrossRef

Tian HC, Liu JQ, Kang XY, Wei DX, Zhang C, Du JC, Yang B, Chen X, Yang CS (2014c) Biotic and abiotic molecule dopants determining the electrochemical performance, stability and fibroblast behavior of conducting polymer for tissue interface. RSC Adv 4(88):47461–47471CrossRef

Tian HC, Liu JQ, Kang XY, Wei DX, Zhang C, Du JC, Yang B, Chen X, Yang CS (2014d) Poly(3,4-ethylenedioxythiophene)/Graphene oxide composite coating for electrode-tissue Interface. IEEE Eng Med Biol:1571–1574

Tian HC, Liu JQ, Kang XY, He Q, Yang B, Chen X, Yang CS (2015) Flexible multi-channel microelectrode with fluidic paths for intramuscular stimulation and recording. Sensor Actuat A-Phys 228:28–39CrossRef

Vallejo-Giraldo AK, Biggs MJP (2014) Biofunctionalisation of electrically conducting polymers. Drug Discov Today 19(1):88–94CrossRef

Wang MH, Nikaido K, Kim Y, Ji BW, Tian HC, Kang XY, Yang CS, Yang B, Chen X, Wang XL, Zhang Y, Liu JQ (2017) Flexible cylindrical neural probe with graphene enchenced conductiive polymer for multi-mode BCI applications, MEMS 2017, Las Vegas, 22–26 Jan

Warden MR, Cardin JA, Deisseroth K (2014) Optical neural interfaces. Annu Rev Biomed Eng 16(16):103–129CrossRef

Wells J, Kao C, Mariappan K, Albea J, Jansen ED, Konrad P, Mahadevan-Jansen A (2005) Optical stimulation of neural tissue in vivo. Opt Lett 30(5):504–506CrossRef

Wise KD, Sodagar AM, Yao Y, Gulari MN, Perlin GE, Najafi K (2008) Microelectrodes, microelectronics, and implantable neural microsystems. Proc IEEE 96(7):1184–1202CrossRef

Yang SY, Kim BN, Zakhidov AA, Taylor PG, Lee JK, Ober CK, Lindau M, Malliaras GG (2011) Detection of transmitter release from single living cells using conducting polymer microelectrodes. Adv Mater 23(24):H184–H188CrossRef

Yang Z, Gao RG, Hu NT, Chai J, Cheng YW, Zhang LY, Wei H, Kong ESW, Zhang YF (2012) The prospective two-dimensional Graphene Nanosheets: preparation, Functionalization, and applications. Nano-Micro Lett 4(1):1–9CrossRef

Yang Z, Zhang Y, Itoh T, Maeda R (2014) Flexible implantable microtemperature sensor fabricated on polymer capillary by programmable UV lithography with multilayer alignment for biomedical applications. J Microelectromech Syst 20:21–29CrossRef

Yoon H, Jang J (2009) Conducting-polymer Nanomaterials for high-performance sensor applications: issues and challenges. Adv Funct Mater 19(10):1567–1576CrossRef

Yoshida K, Farina D, Akay M, Jensen W (2010) Multichannel Intraneural and intramuscular techniques for multiunit recording and use in active prostheses. Proc IEEE 98(3):432–449CrossRef

Yu L, Wu H, Wu B, Wang Z, Cao H, Fu C, Jia N (2014) Magnetic Fe₃O₄-reduced graphene oxide nanocomposites-based electrochemical biosensing. Nano-Micro Lett 6(3):258–267CrossRef

Zhang AMA, Adamantidis A, De LL, Deisseroth K (2007) Circuit-breakers: optical technologies for probing neural signals and systems. Nat Rev Neurosci 8(8):577CrossRef

Zhang Z, Li SW, Xue C, Yang S, Zhang W (2014) A bionic fish cilia median-low frequency three-dimensional piezoresistive MEMS vector hydrophone. Nano-Micro Lett 6(2):136–142CrossRef

Zhao Y (2009) Investigating electrical field-affected skeletal myogenesis using a microfabricated electrode array. Sensor Actuat A-Phys 154(2):281–287CrossRef

Ziegler TS, Takeuchi S (2006) Fabrication of flexible neural probes with built-in microfluidic channels by thermal bonding of Parylene. j. Microelectromech Syst 15(6):1477–1482CrossRef

Title: Electrodes for Nerve Recording and Stimulation
Authors: Jing-Quan Liu
Hong-Chang Tian
Xiao-Yang Kang
Ming-Hao Wang
Publisher: Springer Singapore
Book: Micro Electro Mechanical Systems
Print ISBN: 978-981-10-5944-5

Electronic ISBN: 978-981-10-5945-2

Copyright Year: 2018
DOI: https://doi.org/10.1007/978-981-10-5945-2_43