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Erschienen in:
Modeling and Simulation of Silicon Anisotropic Etching Kapitel lesen Erstes Kapitel lesen

2018 | OriginalPaper | Buchkapitel

Electrodes for Nerve Recording and Stimulation

verfasst von : Jing-Quan Liu, Hong-Chang Tian, Xiao-Yang Kang, Ming-Hao Wang

Erschienen in: Micro Electro Mechanical Systems

Verlag: Springer Singapore

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Abstract

With the rapid development of MEMS fabrication technologies, versatile microelectrodes with different structures and functions have been designed and fabricated. The flexible MEMS microelectrodes exhibit multiaspect excellent characteristics compared to stiff microelectrodes based on silicon or SU-8, which comprising: lighter weight, smaller volume, better conforming to neural tissue, and lower fabrication cost.
This chapter mainly reviewed key technologies on flexible MEMS microelectrodes for neural interface in recent years, including: design and fabrication technology, fluidic channels, μLEDs, and electrode-tissue interface modification technology for performance improvement. Furthermore, the future directions of flexible MEMS microelectrodes were described including transparent and stretchable microelectrodes with characteristics of multifunction, high-density, biodegradation, and next-generation electrode-tissue interface modifications facilitated electrode efficacy and implantation safety.
The goal of this chapter is to provide the reader a broader overview of flexible MEMS technologies that can be applied together to solve problems in neural interface.

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Vorheriges Kapitel Microelectrode Array
Nächstes Kapitel Electrode Array for Neural Interfaces
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Metadaten
Titel
Electrodes for Nerve Recording and Stimulation
verfasst von
Jing-Quan Liu
Hong-Chang Tian
Xiao-Yang Kang
Ming-Hao Wang
Copyright-Jahr
2018
Verlag
Springer Singapore
Buch
Micro Electro Mechanical Systems

Print ISBN: 978-981-10-5944-5

Electronic ISBN: 978-981-10-5945-2

Copyright-Jahr: 2018

DOI
https://doi.org/10.1007/978-981-10-5945-2_43

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