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Erschienen in:
Modeling and Simulation of Silicon Anisotropic Etching Kapitel lesen Erstes Kapitel lesen

2018 | OriginalPaper | Buchkapitel

Microelectrode Array

verfasst von : Renxin Wang, Huaiqiang Yu, Zhihong Li

Erschienen in: Micro Electro Mechanical Systems

Verlag: Springer Singapore

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Abstract

Microelectrode arrays (MEAs) have been applied as chronical interface with the neural system and play important roles in neural prosthesis for various diseases, including sensory and motion injuries such as blind, deaf, and paralyzed, and also mental diseases like depression, Parkinson’s disease, and epilepsy. Thanks the inherent merits of microfabrication, MEAs show the advantages of low cost, mass production, high density, flexibility (optional), small footprint, integratability with ICs (integrated circuits), etc. In this chapter, we discuss about the general requirements and consideration of materials, design, and fabrication of MEAs in details. Then the various devices and their applications in the central nervous system and the peripheral nervous system are overviewed, respectively.

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Vorheriges Kapitel Triboelectric Nanogenerators
Nächstes Kapitel Electrodes for Nerve Recording and Stimulation
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Metadaten
Titel
Microelectrode Array
verfasst von
Renxin Wang
Huaiqiang Yu
Zhihong Li
Copyright-Jahr
2018
Verlag
Springer Singapore
Buch
Micro Electro Mechanical Systems

Print ISBN: 978-981-10-5944-5

Electronic ISBN: 978-981-10-5945-2

Copyright-Jahr: 2018

DOI
https://doi.org/10.1007/978-981-10-5945-2_41

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