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Published in: Microsystem Technologies 8-9/2010

01-08-2010 | Technical Paper

Electroplating of nickel films at ultra low electrolytic temperature

Authors: Chen-Kuei Chung, W. T. Chang, S. T. Hung

Published in: Microsystem Technologies | Issue 8-9/2010

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Abstract

In this paper, we have demonstrated a successful electroplating process of nickel (Ni) in a sulfamate electrolyte bath at ultra low electrolytic temperatures of 273–278 K. The potentiostatic mode is essential for the electroplating process rather than galvanostatic mode. The reason is that diffusion-limited current can be easily obtained by applying a specific potential which is higher than reduction potential. On the contrary, galvanostatic mode can not identify the diffusion-limited current and the reduction will suspend while the setting current is higher than diffusion-limited current ranged in hundreds of μA. The microstructure, morphology and hardness of the Ni electrodeposits were characterized using grazing incidence x-ray diffractometer, atomic force microscopy and nano-indentation test were performed. The hardness of Ni film was much enhanced to around 6.37 GPa at 273 K to 6.18 GPa at 278 K compared with that around 4.11 GPa at 288 K to 4.01 GPa at 293 K. The normal hardness of pure nickel is about 4 GPa. The enhanced hardness of Ni at ultra low temperature is attributed to both mechanisms of reduced grain size strengthening and residual compressive stress hardening.

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Metadata
Title
Electroplating of nickel films at ultra low electrolytic temperature
Authors
Chen-Kuei Chung
W. T. Chang
S. T. Hung
Publication date
01-08-2010
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 8-9/2010
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-009-0955-6

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