Fabrication and characterization of nanostructured metallic arrays with multi-shapes in monolayer and bilayer

Fabrication and characterization of nanostructured metallic arrays with different shapes in monolayer and bilayer were presented in this article. Nano-rhombic, nano-hexagon, and nano-column metallic arrays with the tunable shapes and in-plane dimensions were fabricated by means of vertical reactive ion etching and nanosphere lithography. The nanosize range of nanoparticles is from 50 to 300 nm. Optical characterization of these arrays was performed experimentally by spectroscopy. Specifically, we compared spectra width at site of full width at half maximum (FWHM) of the measured extinction spectra in the visible range to that of the traditional hexagonal-arranged triangular nanoparticles. The results show that the combination of vertical reactive ion etching and nanosphere lithography approach yields as tunable masks and provides an easy way for a flexible nanofabrication. These metallic arrays have narrower FWHM of the spectra which makes them potential applications in biosensors, data storage, and bioreactors.