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Microsystem Technologies
Published in: Microsystem Technologies 8-10/2005

01-08-2005 | Technical paper

Fabrication of a rotary micromirror for fiber-optic switching

Authors: M. Hu, H. Du, S. Ling, B. Liu, G. Lau

Published in: Microsystem Technologies | Issue 8-10/2005

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Abstract

The implementation of all-optical telecommunication networks requires more efficient optical-to-optical wavelength routing devices to replace the conventional optical-to-electrical cross connects. In this paper, we demonstrate a novel rotary micromirror for directly fiber-optic switching. To fabricate this electrostatically actuated rotary micromirror, a very simple micromachining process has been developed using SOI wafer and DRIE technology. Based on this one-mask process, all the components for an NxN cross-connect with 2N-switch-architecture can be fabricated on a monolithic silicon substrate, including the optic fiber couplers, electrostatic comb drives and reflective vertical mirror arrays.
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Literature
Fernandez M, Kruglic E (2002) MEMS technology ushers in a new age in optical switching, Lightwave, August, 17(a)
Hoffmann M, Kopka P, Nusse D, Voges E (2003) Fibre-optical MEMS switches based on bulk silicon micromachining. Microsyst Technol 9:299–303CrossRef
Juan WH, Pang SW (1998) High-aspect-ratio Si vertical mirror arrays for optical switching. J Microelectromech Syst 7(2):207–213CrossRef
Lee S, Huang L, Kim C, Wu M (1999) Free-space fiber-optic switches based on MEMS vertical torsion mirrors. J Lightwave Technology 7(1):7–13
Lopez D, Simon M, Aksyuk V, Cirelli R (2002) Monolithic MEMS optical switch with amplified out-of-plane angular motion. Digest of IEEE/LEOS International Conference on Optical MEMS, pp 165–166
Neilson T (2000) Fully provisioned 112×112 micromechanical optical crossconnect with 35.8 Tb/s demonstrated capacity. Optical Fiber Communication Conference. Optical Society of America, Washington, paper PD-12
Ollier E (2002) Optical MEMS devices based on moving waveguides. IEEE J Select Topics Quantum Electr 8(1):155–162CrossRef
Richard RA (2000) Scaling laws for MEMS mirror-rotation optical cross connect switches. J Lightwave Technol 20(7):1084–1094
Scotti RE, Basavanhally N, Low YL, Ramsey DA, Bishop DJ (2001) The challenges of packaging MEMS components for all optical networks of the future. Proc SPIE 4408:19–27CrossRef
Metadata
Title
Fabrication of a rotary micromirror for fiber-optic switching
Authors
M. Hu
H. Du
S. Ling
B. Liu
G. Lau
Publication date
01-08-2005
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 8-10/2005
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-005-0504-x

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