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Measurement Techniques

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01-12-2016 | NANOMETROLOGY

Hardware/Software Complex for Electrophysical Management of CMOS Technology on Test Structures

Authors: K. G. Popovskikh, V. S. Soldatov, M. V. Oreshkov

Published in: Measurement Techniques | Issue 9/2016

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Abstract

A combined procedural and hardware complex of electrophysical methods for management of submicrometric CMOS integrated circuit technology is developed and implemented. Programmable switching of the elements of the complex that makes it possible to utilize a mutually complementary measurement technique to obtain information needed to correct the production process is created. The complex includes programs to control the measurement and calculation of required characteristics.

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Title: Hardware/Software Complex for Electrophysical Management of CMOS Technology on Test Structures
Authors: K. G. Popovskikh
V. S. Soldatov
M. V. Oreshkov
Publication date: 01-12-2016
Publisher: Springer US
Published in: Measurement Techniques / Issue 9/2016
Print ISSN: 0543-1972
Electronic ISSN: 1573-8906
DOI: https://doi.org/10.1007/s11018-016-1065-3

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