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Optical and Quantum Electronics
Published in: Optical and Quantum Electronics 7/2013

01-07-2013

High-efficiency optical coupling to planar photodiode using metal reflector loaded waveguide grating coupler

Authors: G. Li, Y. Hashimoto, T. Maruyama, K. Iiyama

Published in: Optical and Quantum Electronics | Issue 7/2013

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Abstract

For the realization of optoelectronic integrated circuits, it is required to incident light perpendicularly to a planar Si photodiode. We propose a high-efficient vertical optical coupler using an amorphous Si optical waveguide grating coupler with top reflector, which is transparent at 850 nm wavelength range. The optical waveguide (width of 300 nm \(\times \) height of 100 nm) coupler is analyzed by using finite element method. The coupling efficiency of 80 % is calculated at the grating period of 380 nm, the duty ratio of 0.75 and the depth of 35–65 nm with top metal reflector.
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Metadata
Title
High-efficiency optical coupling to planar photodiode using metal reflector loaded waveguide grating coupler
Authors
G. Li
Y. Hashimoto
T. Maruyama
K. Iiyama
Publication date
01-07-2013
Publisher
Springer US
Published in
Optical and Quantum Electronics / Issue 7/2013
Print ISSN: 0306-8919
Electronic ISSN: 1572-817X
DOI
https://doi.org/10.1007/s11082-013-9674-4

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